Titanium nitride thin films deposited by reactive pulsed laser ablation in RF plasma (Articolo in rivista)

Type
Label
  • Titanium nitride thin films deposited by reactive pulsed laser ablation in RF plasma (Articolo in rivista) (literal)
Anno
  • 2002-01-01T00:00:00+01:00 (literal)
Alternative label
  • Giardini A., Marotta V., Orlando S., Parisi G.P. (2002)
    Titanium nitride thin films deposited by reactive pulsed laser ablation in RF plasma
    in Surface & coatings technology; ELSEVIER SCIENCE BV, PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS, AMSTERDAM (Paesi Bassi)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Giardini A., Marotta V., Orlando S., Parisi G.P. (literal)
Pagina inizio
  • 316 (literal)
Pagina fine
  • 319 (literal)
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  • 151-2 (literal)
Rivista
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  • 4 (literal)
Note
  • ISI Web of Science (WOS) (literal)
  • Scopus (literal)
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  • CNR - IJMIP (literal)
Titolo
  • Titanium nitride thin films deposited by reactive pulsed laser ablation in RF plasma (literal)
Abstract
  • Titanium nitride thin films were deposited on Si (100) substrates by pulsed laser ablation of a titanium target in a N-2, atmosphere (gas pressure approx. 10 Pa) using a doubled frequency Nd:YAG laser (532 nm) also assisted by a 13.56-MHz radio frequency (RF) plasma. Deposition was carried out at various substrate temperatures ranging from 373 up to 873 K and films were analyzed by X-ray diffractometry, scanning electron microscopy and optical emission spectroscopy. A comparison between the 'normal' pulsed laser deposition (PLD) and the RF plasma-assisted PLD showed the influence of the plasma on the structural characteristics of the thin films. (literal)
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