http://www.cnr.it/ontology/cnr/individuo/prodotto/ID33666
On the use and limits of mass spectrometry for the characterization of fluorocarbon emission during plasma processing (Articolo in rivista)
- Type
- Label
- On the use and limits of mass spectrometry for the characterization of fluorocarbon emission during plasma processing (Articolo in rivista) (literal)
- Anno
- 2002-01-01T00:00:00+01:00 (literal)
- Alternative label
Fracassi F., D'Agostino R., Illuzzi F. (2002)
On the use and limits of mass spectrometry for the characterization of fluorocarbon emission during plasma processing
in Journal of the Electrochemical Society
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Fracassi F., D'Agostino R., Illuzzi F. (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Note
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- Univ Bari, Dipartmento Chim, CNR, Ctr Studio Chim Plasmi, Bari, Italy (literal)
- Titolo
- On the use and limits of mass spectrometry for the characterization of fluorocarbon emission during plasma processing (literal)
- Abstract
- This paper deals with the quadrupole mass spectrometric evaluation of
fluoro-compd. emissions during plasma processing. A crit. discussion of
the anal. procedure including the estn. of quantification limits,
detection limits, and t-Student test, is reported. The use of pos. and
neg. chem. ionization as the ionization source to reduce the interference
due to peak overlapping is also examd. (literal)
- Prodotto di
- Autore CNR
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