Improving holographic reconstruction by automatic Butterworth filtering for microelectromechanical systems characterization (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Improving holographic reconstruction by automatic Butterworth filtering for microelectromechanical systems characterization (Articolo in rivista) (literal)

Anno

• 2015-01-01T00:00:00+01:00 (literal)

Alternative label

• MARCELLA MATRECANO, PASQUALE MEMMOLO, LISA MICCIO, ANNA PERSANO, FABIO QUARANTA, PIETRO SICILIANO AND PIETRO FERRARO (2015)
  Improving holographic reconstruction by automatic Butterworth filtering for microelectromechanical systems characterization
  in Applied optics (2004, Online)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• MARCELLA MATRECANO, PASQUALE MEMMOLO, LISA MICCIO, ANNA PERSANO, FABIO QUARANTA, PIETRO SICILIANO AND PIETRO FERRARO (literal)

Pagina inizio

• 3428 (literal)

Pagina fine

• 3432 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://dx.doi.org/10.1364/AO.54.003428 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 54 (literal)

Rivista

• Applied optics (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 11 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR--Istituto di Cibernetica E. Caianiello--Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy; IMM-CNR, Institute for Microelectronics and Microsystems, Unit of Lecce, Via Monteroni, 73100 Lecce, Italy; Center for Advanced Biomaterials for HealthCare, Italian Institute of Technology IIT at CRIB, Largo Barsanti e Matteucci 53, 80125 Napoli, Italy (literal)

Titolo

• Improving holographic reconstruction by automatic Butterworth filtering for microelectromechanical systems characterization (literal)

Abstract

• Digital holographic microscopy is an important interferometric tool in optical metrology allowing the investigation of engineered surfaces with microscale lateral resolution and nanoscale axial precision. In particular, microelectromechanical systems (MEMS) surface analysis, conducted by holographic characterization, requires high accuracy for functional testing. The main issues related to MEMS inspection are the superficial roughness and the complex geometry resulting from the several fabrication steps. Here, an automatic procedure, particularly suited in the case of high-roughness surfaces, is presented to selectively filter the spectrum, providing very low-noise reconstructed images. The numerical procedure is based on Butterworth filtering, and the obtained results demonstrate a significant increase in the images' quality and in the accuracy of the measurements, making our technique highly applicable for quantitative phase imaging in MEMS analysis. Furthermore, our method is fully tunable to the spectrum under investigation and automatic. This makes it highly suitable for real-time applications. Several experimental tests show the suitability of the proposed approach. (literal)

Prodotto di

• Istituto di cibernetica \"Edoardo Caianiello\" (ISASI) (Istituto)
• Sviluppo di tecniche di diagnostica ottica, microscopia ed interferometria (MD.P03.022.001) (Modulo)
• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR

• MARCELLA MATRECANO (Persona)
• LISA MICCIO (Unità di personale interno)
• ANNA PERSANO (Unità di personale interno)
• PIETRO FERRARO (Unità di personale interno)

Incoming links:

Autore CNR di

• PIETRO FERRARO (Unità di personale interno)
• LISA MICCIO (Unità di personale interno)
• ANNA PERSANO (Unità di personale interno)
• MARCELLA MATRECANO (Persona)
• http://www.cnr.it/ontology/cnr/individuo/unitaDiPersonaleEsterno/ID26703

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Istituto di cibernetica \"Edoardo Caianiello\" (ISASI) (Istituto)
• Sviluppo di tecniche di diagnostica ottica, microscopia ed interferometria (MD.P03.022.001) (Modulo)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Applied optics (Rivista)