Manufacturing self-assembled block copolymer film involves distributing first solution containing block copolymer onto substrate to partially coat substrate surface and self-assembling block copolymer by heating first intermediate product (Brevetto)

Type
Label
  • Manufacturing self-assembled block copolymer film involves distributing first solution containing block copolymer onto substrate to partially coat substrate surface and self-assembling block copolymer by heating first intermediate product (Brevetto) (literal)
Anno
  • 2014-01-01T00:00:00+01:00 (literal)
Alternative label
  • PEREGO M, SEGUINI G, FERRARESE LUPI F (2014)
    Manufacturing self-assembled block copolymer film involves distributing first solution containing block copolymer onto substrate to partially coat substrate surface and self-assembling block copolymer by heating first intermediate product
    (literal)
Titolo
  • Manufacturing self-assembled block copolymer film involves distributing first solution containing block copolymer onto substrate to partially coat substrate surface and self-assembling block copolymer by heating first intermediate product (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • PEREGO M, SEGUINI G, FERRARESE LUPI F (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#proprieta
  • CONSIGLIO NAZ DELLE RICERCHE(CNDR-C) (literal)
Http://www.cnr.it/ontology/cnr/brevetti.owl#tipoDiBrevetto
  • Europeo (literal)
Numero brevetto
  • WO2014181302-A1 (literal)
Anno di deposito
  • 2014 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Laboratorio MDM, IMM-CNR Via C. Olivetti 2, I-20864 Agrate Brianza (MB) (literal)
Titolo
  • Manufacturing self-assembled block copolymer film involves distributing first solution containing block copolymer onto substrate to partially coat substrate surface and self-assembling block copolymer by heating first intermediate product (literal)
Abstract
  • NOVELTY - Manufacturing self-assembled block copolymer film having two or more blocks, comprises distributing a first solution containing at least one block copolymer onto a substrate to at least partially coat a surface of the substrate to obtain a first intermediate product, and self-assembling the block copolymer by heating the first intermediate product. USE - The process is useful for manufacturing self-assembled block copolymer film (claimed), which is useful in microelectronic devices and for nanostructuring of devices such as optoelectronics, solar cells, biological applications and storage on magnetic media. ADVANTAGE - The process accurately controls the manufacture of self-assembled block copolymer film with good quality and improved physicochemical properties in an efficient, reliable, rapid, easy and inexpensive manner, and largely reduces the duration of the thermal treatments down to time scales compatible with requirements of microelectronics. DETAILED DESCRIPTION - Manufacturing self-assembled block copolymer film having two or more blocks, comprises distributing a first solution containing at least one block copolymer onto a substrate to at least partially coat a surface of the substrate to obtain a first intermediate product, and self-assembling the block copolymer by heating the first intermediate product. The self-assembling step is carried out through a first rapid thermal process (RTP) comprising: heating the first intermediate product up to a first target temperature of a glass transition temperature Tg of the block copolymer to an order-disorder transition temperature of the block copolymer, through a first temperature rising ramp having a first rate of temperature change of greater than 5 degrees C/second; maintaining the first intermediate product at the first target temperature for a first time interval of less than 60 minutes, where a sample is obtained on the surface of which a self-assembled film of the block copolymer is made; and cooling the sample to the ambient temperature through a first temperature descending ramp. An INDEPENDENT CLAIM is included for the self-assembled block copolymer film manufactured by the process. (literal)
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