Advanced Characterization Of Carrier Profiles In Germanium Using Micro-Machined Contact Probes (Contributo in atti di convegno)

Type
Label
  • Advanced Characterization Of Carrier Profiles In Germanium Using Micro-Machined Contact Probes (Contributo in atti di convegno) (literal)
Anno
  • 2012-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1063/1.4766516 (literal)
Alternative label
  • Clarysse, T.; Konttinen, M.; Parmentier, B.; Moussa, A.; Vandervorst, W.; Impellizzeri, G.; Napolitani, E.; Privitera, V.; Nielsen, P. F.; Petersen, D. H.; Hansen, O. (2012)
    Advanced Characterization Of Carrier Profiles In Germanium Using Micro-Machined Contact Probes
    in Ion Implantation Technology 2012
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Clarysse, T.; Konttinen, M.; Parmentier, B.; Moussa, A.; Vandervorst, W.; Impellizzeri, G.; Napolitani, E.; Privitera, V.; Nielsen, P. F.; Petersen, D. H.; Hansen, O. (literal)
Pagina inizio
  • 167 (literal)
Pagina fine
  • 170 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 1496 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#volumeInCollana
  • 1496 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 4 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1) imec, Kapeldreef 75, B-3001 Leuven, Belgium, 2) Department of Physics, University of Jyväskylä, P.O. Box 35, 40014 Jyväskylä, Finland, 3) Instituut voor Kern- en Stralingsfysika, K.U. Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium, 4) MATIS IMM-CNR and Dipartimento di Fisica e Astronomia, Univ. Di Catania, 95123 Catania, Italy, 5) MATIS IMM-CNR and Dipartimento di Fisica e Astronomia, Univ. Di Padova, 35131 Padova, Italy, 6) Capres A/S, Scion-DTU, Building 373, DK-2800 Kongens Lyngby, Denmark, 7) DTU Nanotech, Dept. of Micro and Nanotechnology, Technical University of Denmark, Building 345 East, DK-2800 Kongens Lyngby, Denmark, 8) CINF, Center for Individual Nanoparticle Functionality, Technical University of Denmark,DK-2800 Kongens Lyngby, Denmark, (literal)
Titolo
  • Advanced Characterization Of Carrier Profiles In Germanium Using Micro-Machined Contact Probes (literal)
Abstract
  • The accurate determination of the sheet resistance and carrier depth profile, i.e. active dopant profile, of shallow junction isolated structures involving new high mobility materials, such as germanium, is a crucial topic for future CMOS development. In this work, we discuss the capabilities of new concepts based on micro machined, closely spaced contact probes (10 mu m pitch). When using four probes to perform sheet resistance measurements, a quantitative carrier profile extraction based on the evolution of the sheet resistance versus depth along a beveled surface is obtained. Considering the use of only two probes, a spreading resistance like setup is obtained with small spacing and drastically reduced electrical contact radii (similar to 10 nm) leading to a substantial reduction of the correction factors which are normally required for converting spreading resistance profiles. We demonstrate the properties of both approaches on Al+ implants in germanium with different anneal treatments. (literal)
Prodotto di
Autore CNR
Insieme di parole chiave

Incoming links:


Autore CNR di
Prodotto
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
Insieme di parole chiave di
data.CNR.it