http://www.cnr.it/ontology/cnr/individuo/prodotto/ID319087
Ultrahigh vacuum and low-temperature cleaning of oxide surfaces using a low-concentration ozone beam (Articolo in rivista)
- Type
- Label
- Ultrahigh vacuum and low-temperature cleaning of oxide surfaces using a low-concentration ozone beam (Articolo in rivista) (literal)
- Anno
- 2014-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1063/1.4890208 (literal)
- Alternative label
Pratt, A.; Graziosi, P.; Bergenti, I.; Prezioso, M.; Dediu, A.; Yamauchi, Y. (2014)
Ultrahigh vacuum and low-temperature cleaning of oxide surfaces using a low-concentration ozone beam
in Review of scientific instruments
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Pratt, A.; Graziosi, P.; Bergenti, I.; Prezioso, M.; Dediu, A.; Yamauchi, Y. (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
- Note
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- National Institute of Materials Science (NIMS) - Japan; University of York - UK; Consiglio Nazionale delle Ricerche (CNR); University of California Santa Barbara (literal)
- Titolo
- Ultrahigh vacuum and low-temperature cleaning of oxide surfaces using a low-concentration ozone beam (literal)
- Abstract
- We present a novel method of delivering a low-concentration (<15%) ozone beam to an ultra-high vacuum environment for the purpose of cleaning and dosing experimental samples through oxidation processing. The system described is safe, low-cost, and practical and overcomes the limitations of ozone transport in the molecular flow environment of high or ultrahigh vacuum whilst circumventing the use of pure ozone gas which is potentially highly explosive. The effectiveness of this method in removing surface contamination is demonstrated through comparison of high-temperature annealing of a simple oxide (MgO) in ozone and oxygen environments as monitored using quadrupole mass spectroscopy and Auger electron spectroscopy. Additionally, we demonstrate the potential of ozone for obtaining clean complex oxide surfaces without the need for high-temperature annealing which may significantly alter surface structure. (C) 2014 AIP Publishing LLC. (literal)
- Prodotto di
- Autore CNR
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- Autore CNR di
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi