Exploring EUV near absorption edge optical constants for enhanced and sensitive grazing incidence reflectivity (Contributo in atti di convegno)

Type

• Contributo in atti di convegno (Classe)
• Prodotto della ricerca (Classe)

Label

• Exploring EUV near absorption edge optical constants for enhanced and sensitive grazing incidence reflectivity (Contributo in atti di convegno) (literal)

Anno

• 2013-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1117/12.2027295 (literal)

Alternative label

• Giday, S. Mewael; Zuppella, Paola; Pelizzo, M. G.; Nicolosi, Piergiorgio (2013)
  Exploring EUV near absorption edge optical constants for enhanced and sensitive grazing incidence reflectivity
  in SPIE Optics + Photonics San Diego 2013
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Giday, S. Mewael; Zuppella, Paola; Pelizzo, M. G.; Nicolosi, Piergiorgio (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 8861 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#volumeInCollana

• 8861 (literal)

Rivista

• Proceedings of SPIE, the International Society for Optical Engineering (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 15 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• University of Padua (literal)

Titolo

• Exploring EUV near absorption edge optical constants for enhanced and sensitive grazing incidence reflectivity (literal)

Abstract

• A characterization procedures to test multilayers in the EUV and soft X-Ray wavelengths are theoretically studied in this paper. The fact that most candidate elements have absorption edge energies in the EUV and soft X-Ray has demanded extensive studies on the optical constants and their possible impact on multilayer design and reflectivity. Thus, EUV and soft X-Ray multilayers are preliminary designed and tested for various parameters. Effects and impacts of interface roughness, interlayer thickness, optical constants fluctuations, different phases of interlayer compounds on the reflectivity of multilayers are investigated in this piece of work. Two theoretical models are used each contributing different properties of the multilayers. Near absorption edge and off-absorption edge wavelengths are compared and contrasted to investigate what optical constants near the resonance edges can render in the EUV and soft X-Ray regime. Almost in all simulations the near absorption edge reflectivity have shown superior sensitivity to fluctuations of various design parameters. In addition, possible engineering tips of near absorption edge optical constants are indicated. (literal)

Prodotto di

• Istituto di fotonica e nanotecnologie (IFN) (Istituto)
• Coatings And Optical materialS (MD.P03.010.003) (Modulo)

Autore CNR

• PAOLA ZUPPELLA (Persona)
• MARIA GUGLIELMINA PELIZZO (Persona)

Insieme di parole chiave

• Keywords of "Exploring EUV near absorption edge optical constants for enhanced and sensitive grazing incidence reflectivity" (Insieme di parole chiave)

Incoming links:

Prodotto

• Istituto di fotonica e nanotecnologie (IFN) (Istituto)
• Coatings And Optical materialS (MD.P03.010.003) (Modulo)

Autore CNR di

• MARIA GUGLIELMINA PELIZZO (Persona)
• PAOLA ZUPPELLA (Persona)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Proceedings of SPIE, the International Society for Optical Engineering (Rivista)

Insieme di parole chiave di

• Keywords of "Exploring EUV near absorption edge optical constants for enhanced and sensitive grazing incidence reflectivity" (Insieme di parole chiave)