Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors (Contributo in atti di convegno)

Type

• Prodotto della ricerca (Classe)
• Contributo in atti di convegno (Classe)

Label

• Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors (Contributo in atti di convegno) (literal)

Anno

• 2011-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1109/TRANSDUCERS.2011.5969725 (literal)

Alternative label

• Belsito, L.a and Mancarella, F.a and Ferri, M.a and Roncaglia, A.a and Biagi, E.b and Cerbai, S.b and Masotti, L.b and Masetti, G.c and Speciale, N.c (2011)
  Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors
  in 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Belsito, L.a and Mancarella, F.a and Ferri, M.a and Roncaglia, A.a and Biagi, E.b and Cerbai, S.b and Masotti, L.b and Masetti, G.c and Speciale, N.c (literal)

Pagina inizio

• 594 (literal)

Pagina fine

• 597 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni

• cited By 3; Conference of 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference Date: 5 June 2011 Through 9 June 2011; Conference Code:86248 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://www.scopus.com/inward/record.url?eid=2-s2.0-80052106354&partnerID=40&md5=536ae36bc7783a39e123a21e6461eb30 (literal)

Note

• Scopu (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• Institute of Microelectronics and Microsystems, CNR, Bologna, Italy; Electronics and Telecommunications Department, University of Florence, Florence, Italy; Electronics, Computer Science and Systems Department, University of Bologna, Bologna, Italy (literal)

Titolo

• Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn

• 9781457701573 (literal)

Abstract

• A Micro-Opto-Mechanical-System (MOMS) based technology for the fabrication of Fabry-Perot interferometers on optical fiber is presented. Exploiting silicon micromachining techniques, the fabrication of ultrasonic receiver arrays suitable for wideband and high performance applications is demonstrated. Thanks to their high miniaturization level, the devices presented may be suited to minimally invasive endoscopic applications in medicine. The devices are based on the use of a SU-8 polymer interferometer manufactured on a micromachined silicon frame whose thickness can be modulated by the incoming ultrasound waves. In this way, the ultrasonic detection is performed by measuring the Fabry-Perot thickness modulation from the variation of the reflected intensity of a fiber-driven continuous laser beam hitting the interferometer. (literal)

Prodotto di

• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR

• FULVIO MANCARELLA (Unità di personale interno)
• ALBERTO RONCAGLIA (Persona)
• MATTEO FERRI (Unità di personale esterno)
• LUCA BELSITO (Persona)

Insieme di parole chiave

• Parole chiave di "Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors" (Insieme di parole chiave)

Incoming links:

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR di

• MATTEO FERRI (Unità di personale esterno)
• ALBERTO RONCAGLIA (Persona)
• LUCA BELSITO (Persona)
• FULVIO MANCARELLA (Unità di personale interno)

Insieme di parole chiave di

• Parole chiave di "Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors" (Insieme di parole chiave)