Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors (Contributo in atti di convegno)

Type
Label
  • Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors (Contributo in atti di convegno) (literal)
Anno
  • 2011-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1109/TRANSDUCERS.2011.5969171 (literal)
Alternative label
  • Ferri, M. and Belsito, L. and Mancarella, F. and Masini, L. and Roncaglia, A. and Yan, J. and Seshia, A.A. and Zalesky, J. and Soga, K. (2011)
    Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors
    in 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Ferri, M. and Belsito, L. and Mancarella, F. and Masini, L. and Roncaglia, A. and Yan, J. and Seshia, A.A. and Zalesky, J. and Soga, K. (literal)
Pagina inizio
  • 1056 (literal)
Pagina fine
  • 1059 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni
  • cited By 1; Conference of 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference Date: 5 June 2011 Through 9 June 2011; Conference Code:86248 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://www.scopus.com/inward/record.url?eid=2-s2.0-80052134324&partnerID=40&md5=0b3cc58f443e1d819a1e669b1fbe7cea (literal)
Note
  • Scopu (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Institute of Microelectronics and Microsystems, CNR, Bologna, Italy; Department of Engineering, University of Cambridge, United Kingdom; Czech Technical University in Prague, Faculty of Civil Engineering, Czech Republic (literal)
Titolo
  • Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn
  • 9781457701573 (literal)
Abstract
  • A novel type of linear extensometer with exceptionally high resolution of 4 nm based on MEMS resonant strain sensors bonded on steel and operating in a vacuum package is presented. The tool is implemented by means of a steel thin bar that can be pre-stressed in tension within two fixing anchors. The extension of the bar is detected by using two vacuum-packaged resonant MEMS double- ended tuning fork (DETF) sensors bonded on the bar with epoxy glue, one of which is utilized for temperature compensation. Both sensors are driven by a closed loop self-oscillating transresistance amplifier feedback scheme implemented on a PCB (Printed Circuit Board). On the same board, a microcontroller-based frequency measurement circuit is also implemented, which is able to count the square wave fronts of the MEMS oscillator output with a resolution of 20 nsec. The system provides a frequency noise of 0.2 Hz corresponding to an extension resolution of 4 nm for the extensometer. Nearly perfect temperature compensation of the frequency output is achieved in the temperature range 20-35 C using the reference sensor. (literal)
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