Non-nitridated oxides: abnormal behaviour of n-4H-SiC/SiO2 capacitors at low temperature caused by near interface states (Contributo in atti di convegno)

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Label
  • Non-nitridated oxides: abnormal behaviour of n-4H-SiC/SiO2 capacitors at low temperature caused by near interface states (Contributo in atti di convegno) (literal)
Anno
  • 2011-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.4028/www.scientific.net/MSF.679-680.346 (literal)
Alternative label
  • Pintilie, I.; Moscatell, F.; Nipoti, R.; Poggi, A.; Solmi, S.; Lovlie, L. S.; Svensson, B. G. (2011)
    Non-nitridated oxides: abnormal behaviour of n-4H-SiC/SiO2 capacitors at low temperature caused by near interface states
    in 8th European Conference on Silicon Carbide and Related Materials, Sundvolden Conf Ctr, Oslo, NORWAY, AUG 29-SEP 02, 2010
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Pintilie, I.; Moscatell, F.; Nipoti, R.; Poggi, A.; Solmi, S.; Lovlie, L. S.; Svensson, B. G. (literal)
Pagina inizio
  • 346 (literal)
Pagina fine
  • 349 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://www.scientific.net/MSF.679-680.346 (literal)
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  • SILICON CARBIDE AND RELATED MATERIALS 2010 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 679-680 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#volumeInCollana
  • 679-680 (literal)
Rivista
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  • 4 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • National Institute of Materials Physics - Romania, Università di Oslo, Consiglio Nazionale delle Ricerche (literal)
Titolo
  • Non-nitridated oxides: abnormal behaviour of n-4H-SiC/SiO2 capacitors at low temperature caused by near interface states (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn
  • 978-3-03785-079-4 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#curatoriVolume
  • Monakhov, EV; Hornos, T; Svensson, BG (literal)
Abstract
  • Comparative studies of gate oxides on a N+ pre-implanted area (N-interface similar to 1x10(19)cm(-3)) and on a virgin Si face 4H-SiC material (N-interface similar to 1x10(16)cm(-3)) have been undertaken by means of Capacitance-Voltage (C-V) characteristics, performed at different temperatures and frequencies, and Thermal Dielectric Relaxation Current technique. In the non implanted samples, the stretch out of the C-V curves get larger as the temperature is lowered to 150K, while for lower temperatures the C-V characteristics become steeper and some discontinuities occur. These discontinuities are specific for the non-implanted sample and are associated with charging of the fast near interface states (NIToxfast) via a tunneling from the shallow interface states (D-it). The tunneling from the shallow D-it to NIToxfast supress the a.c. response of D-it, which is recovered only after most of the NIToxfast are charged with electrons. (literal)
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