Programmable mechanical resonances in MEMS by localized Joule heating of phase change materials (Articolo in rivista)

Type
Label
  • Programmable mechanical resonances in MEMS by localized Joule heating of phase change materials (Articolo in rivista) (literal)
Anno
  • 2013-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1002/adma.201302087 (literal)
Alternative label
  • Manca, N.ab, Pellegrino, L.a , Kanki, T.c, Yamasaki, S.c, Tanaka, H.c, Siri, A.S.ab, Marré, D.ab (2013)
    Programmable mechanical resonances in MEMS by localized Joule heating of phase change materials
    in Advanced materials (Weinh., Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Manca, N.ab, Pellegrino, L.a , Kanki, T.c, Yamasaki, S.c, Tanaka, H.c, Siri, A.S.ab, Marré, D.ab (literal)
Pagina inizio
  • 6430 (literal)
Pagina fine
  • 6435 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://www.scopus.com/inward/record.url?eid=2-s2.0-84888644635&partnerID=q2rCbXpz (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 25 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 44 (literal)
Note
  • Scopu (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • a CNR-SPIN, Corso Perrone 24, Genova 16152, Italy b Physics Department, University of Genova, Via Dodecaneso 33, Genova 16146, Italy c Institute of Scientific and Industrial Research, Osaka University, Mihogaoka Ibaraki 8-1, Osaka 567-0047, Japan (literal)
Titolo
  • Programmable mechanical resonances in MEMS by localized Joule heating of phase change materials (literal)
Abstract
  • A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. (literal)
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