Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing (Articolo in rivista)

Type
Label
  • Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing (Articolo in rivista) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Alternative label
  • Tsoutsou, D; Scarel, G; Debernardi, A; Capelli, SC; Volkos, SN; Lamagna, L; Schamm, S; Coulon, PE; Fanciulli, M (2008)
    Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing
    in Microelectronic engineering
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Tsoutsou, D; Scarel, G; Debernardi, A; Capelli, SC; Volkos, SN; Lamagna, L; Schamm, S; Coulon, PE; Fanciulli, M (literal)
Pagina inizio
  • 2411 (literal)
Pagina fine
  • 2413 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 85 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • \"[Tsoutsou, D.; Scarel, G.; Debernardi, A.; Capelli, S. C.; Volkos, S. N.; Lamagna, L.; Fanciulli, M.] INFM, CNR, Lab Nazl MDM, I-20041 Agrate Brianza, MI, Italy; [Schamm, S.; Coulon, P. E.] Univ Toulouse, CNRS, CEMES, F-31055 Toulouse 04, France; [Fanciulli, M.] Univ Milan, Dipartimento Sci Mat, Milan, Italy (literal)
Titolo
  • Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing (literal)
Abstract
  • Rare earth oxides (REOs) have lately received extensive attention in relation to the continuous scaling down of non-volatile memories (NVMs). In particular, La2O3 films are promising for integration into future NVMs because they are expected to crystallize above 400 degrees C in the hexagonal phase (h-La2O3) which has a higher K value than the cubic phase (c-La2O3) in which most of REOs crystallize. In this work, La2O3 films are grown on Si by atomic layer deposition using La(C5H5)(3) and H2O. Within the framework of the h-La2O3 formation, we systematically study the crystallographic evolution of La2O3 films versus annealing temperature (200-600 degrees C) by Fourier transform infrared spectroscopy (FTIR) and grazing incidence X-ray diffraction (GIXRD). As-grown films are chemically unstable in air since a rapid transformation into monoclinic LaO(OH) and hexagonal La(OH)(3) occurs. Vacuum annealing of sufficiently thick (> 100 nm) La(OH)(3) layers induces clear changes in FTIR and GIXRD spectra: c-La2O3 gradually forms in the 300-500 degrees C range while annealing at 600 degrees C generates h-La2O3 which exhibits, as inferred from our electrical data, a desirable k similar to 27. A quick transformation from h-La2O3 into La(OH)(3) occurs due to H2O absorption, indicating that the annealed films are chemically unstable. This study extends our recent work on the h-La2O3 formation. (C) 2008 Elsevier B.V. All rights reserved. (literal)
Prodotto di
Autore CNR
Insieme di parole chiave

Incoming links:


Autore CNR di
Prodotto
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
Insieme di parole chiave di
data.CNR.it