The international VAMAS project on X-ray reflectivity measurements for evaluation of thin films and multilayers - Preliminary results from the second round-robin (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• The international VAMAS project on X-ray reflectivity measurements for evaluation of thin films and multilayers - Preliminary results from the second round-robin (Articolo in rivista) (literal)

Anno

• 2008-01-01T00:00:00+01:00 (literal)

Alternative label

• Matyi, RJ; Depero, LE; Bontempi, E; Colombi, P; Gibaud, A; Jergel, M; Krumrey, M; Lafford, TA; Lamperti, A; Meduna, M; Van der Lee, A; Wiemer, C (2008)
  The international VAMAS project on X-ray reflectivity measurements for evaluation of thin films and multilayers - Preliminary results from the second round-robin
  in Thin solid films (Print)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Matyi, RJ; Depero, LE; Bontempi, E; Colombi, P; Gibaud, A; Jergel, M; Krumrey, M; Lafford, TA; Lamperti, A; Meduna, M; Van der Lee, A; Wiemer, C (literal)

Pagina inizio

• 7962 (literal)

Pagina fine

• 7966 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 516 (literal)

Rivista

• Thin solid films (Rivista)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• \"[Matyi, R. J.] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12222 USA; [Depero, L. E.; Bontempi, E.; Colombi, P.] Univ Brescia, Chem Technol Lab, Brescia, Italy; [Jergel, M.] Slovak Acad Sci, Inst Phys, Bratislava, Slovakia; [Krumrey, M.] Phys Tech Bundesanstalt, Berlin, Germany; [Lamperti, A.] Univ Durham, Dept Phys, Durham, England; [Meduna, M.] Masaryk Univ, Dept Condensed Matter Phys, Brno, Czech Republic; [Van der Lee, A.] Univ Montpellier 2, Inst Europeen Membranes, UMR 5635, F-34095 Montpellier 5, France; [Wiemer, C.] INFM, CNR, Lab MDM, Agrate Brianza, MI, Italy (literal)

Titolo

• The international VAMAS project on X-ray reflectivity measurements for evaluation of thin films and multilayers - Preliminary results from the second round-robin (literal)

Abstract

• X-ray reflectometry (XRR) is a unique technique for thin film analysis providing information on thickness, density, and roughness. The Versailles Project on Advanced Materials and Standards (VAMAS) project 'X-ray reflectivity measurements for evaluation of thin films and multilayers' has the goal to assess the accuracy and precision of thickness, density and roughness as determined by XRR measurements and simulations. Here we present preliminary results from the second round-robin analysis on a TaN/Ta metallization on a silicon substrate. This work demonstrated a good inter-laboratory reproducibility for the tantalum film thickness with a standard deviation of 0.04 nm corresponding to about 0.3%. The use of the auto-correlation function (extracted from the derivative of density profiles obtained via a Fourier transform) was found to provide useful layer thickness measurements from important samples that are too complex for a simple direct simulation and fitting approach. (C) 2008 Elsevier B.V. All rights reserved. (literal)

Prodotto di

• Materiali, processi, e tecniche analitiche per la realizzazione di dispositivi innovativi con funzionalità logiche o di memoria non volatile integrabili su Silicio (MD.P05.007.001) (Modulo)

Autore CNR

• CLAUDIA WIEMER (Unità di personale interno)
• ALESSIO LAMPERTI (Unità di personale interno)

Insieme di parole chiave

• Keywords of "The international VAMAS project on X-ray reflectivity measurements for evaluation of thin films and multilayers - Preliminary results from the second round-robin" (Insieme di parole chiave)

Incoming links:

Autore CNR di

• CLAUDIA WIEMER (Unità di personale interno)
• ALESSIO LAMPERTI (Unità di personale interno)

Prodotto

• Materiali, processi, e tecniche analitiche per la realizzazione di dispositivi innovativi con funzionalità logiche o di memoria non volatile integrabili su Silicio (MD.P05.007.001) (Modulo)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Thin solid films (Rivista)

Insieme di parole chiave di

• Keywords of "The international VAMAS project on X-ray reflectivity measurements for evaluation of thin films and multilayers - Preliminary results from the second round-robin" (Insieme di parole chiave)