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Electrical activity of structural defects in 3C-SiC (Articolo in rivista)
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- Electrical activity of structural defects in 3C-SiC (Articolo in rivista) (literal)
- Anno
- 2011-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.4028/www.scientific.net/MSF.679-680.273 (literal)
- Alternative label
Eriksson, J.a b and Roccaforte, F.a and Weng, M.-H.a and Giannazzo, F.a and Lorenzzi, J.c and Raineri, V.a (2011)
Electrical activity of structural defects in 3C-SiC
in Materials science forum
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- Eriksson, J.a b and Roccaforte, F.a and Weng, M.-H.a and Giannazzo, F.a and Lorenzzi, J.c and Raineri, V.a (literal)
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- cited By (since 1996)0; Conference of org.apache.xalan.xsltc.dom.DOMAdapter@696a75e5 ; Conference Date: org.apache.xalan.xsltc.dom.DOMAdapter@4c624374 Through org.apache.xalan.xsltc.dom.DOMAdapter@473a9bd9; Conference Code:84545 (literal)
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- CNR-IMM, Strada VIII n. 5, Zona Industriale, 95121 Catania, Italy;
Scuola Superiore - Università di Catania, Via San Nullo 5/i, 95123 Catania, Italy;
LMI, UCBL1, 43 Bd du 11 nov. 1918, 69622 Villeurbanne, France (literal)
- Titolo
- Electrical activity of structural defects in 3C-SiC (literal)
- Abstract
- Defects in cubic silicon carbide (3C-SiC) epilayers, that were grown using different techniques and on different substrates, were studied in terms of electrical activity and device limiting implications. An electrical characterization by conductive atomic force microscopy (C-AFM) showed that stacking faults (SFs) are normally the predominant type of defects that are electrically active at the semiconductor surface and, therefore, the most important defects that can affect the contact properties on these epilayers. It is also shown that an ultraviolet (UV) irradiation process can be used to suppress detrimental leakage currents passing through SFs that are carbon terminated at the semiconductor surface. Indeed, current-voltage characterization of Au/3C-SiC diodes showed a subsequent improvement of the Schottky behavior. (c) (2011) Trans Tech Publications. (literal)
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