Interface width evaluation in thin layered CoFeB/MgO multilayers including Ru or Ta buffer layer by X-ray reflectivity (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Interface width evaluation in thin layered CoFeB/MgO multilayers including Ru or Ta buffer layer by X-ray reflectivity (Articolo in rivista) (literal)

Anno

• 2013-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1016/j.tsf.2012.11.130 (literal)

Alternative label

• Lamperti, A.a and Ahn, S.-M.b and Ocker, B.c and Mantovan, R.a and Ravelosona, D.b (2013)
  Interface width evaluation in thin layered CoFeB/MgO multilayers including Ru or Ta buffer layer by X-ray reflectivity
  in Thin solid films (Print); ELSEVIER SCIENCE SA LAUSANNE, PO BOX 564, 1001 LAUSANNE 1 (Svizzera)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Lamperti, A.a and Ahn, S.-M.b and Ocker, B.c and Mantovan, R.a and Ravelosona, D.b (literal)

Pagina inizio

• 79 (literal)

Pagina fine

• 82 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni

• cited By (since 1996)1 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://www.scopus.com/inward/record.url?eid=2-s2.0-84879888254&partnerID=40&md5=9c5cc6455fb85200327707bc1b9b2b5b (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 533 (literal)

Rivista

• Thin solid films (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 4 (literal)

Note

• Scopu (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• Laboratorio MDM, IMM-CNR, via C. Olivetti 2, 20864 Agrate Brianza (MB), Italy; Institute d'Electronique Fondamentale, CNRS, Universitè Paris-Sud, 91405 Orsay, France; Singulus Technologies AG, Hanauer Landstrasse 103, 63796 Kahl am Main, Germany (literal)

Titolo

• Interface width evaluation in thin layered CoFeB/MgO multilayers including Ru or Ta buffer layer by X-ray reflectivity (literal)

Abstract

• To elucidate in details any possible influence of the adjacent layers on perpendicular magnetic anisotropy in very thin ferromagnetic CoFeB electrodes of CoFeB/MgO based stacks, we grew by sputtering BL/CoFeB (1 nm) and BL/CoFeB (1 nm)/MgO (2 nm), being BL (buffer layer) = Ta (5 nm) or Ru (1 nm) multilayers, consisting of 30 repetitions of the bi- or tri-layers. Specular X-ray reflectivity (XRR) has been performed on both as grown and annealed (300 C in vacuum) multilayers. From XRR results, good reproducibility of each layer thickness is achieved, indicating a well-controlled film growth. Further, CoFeB/MgO interface is found to be quite smooth and stable with annealing, as shown by the limited interface width, while BL/CoFeB interface widens upon annealing, in particular when BL = Ta is used. We discuss the above findings, also considering the role of possible layer crystallinity in affecting the interface width, and tentatively relate them to the magnetic anisotropic behavior of the stacks. © 2012 Elsevier B.V. All rights reserved. (literal)

Editore

• ELSEVIER SCIENCE SA LAUSANNE (Editore)

Prodotto di

• Crescita e caratterizzazione di materiali magnetici e multifunzionali (MD.P05.028.001) (Modulo)
• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR

• ROBERTO MANTOVAN (Unità di personale interno)
• ALESSIO LAMPERTI (Unità di personale interno)

Insieme di parole chiave

• Keywords of "Interface width evaluation in thin layered CoFeB/MgO multilayers including Ru or Ta buffer layer by X-ray reflectivity" (Insieme di parole chiave)

Incoming links:

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Crescita e caratterizzazione di materiali magnetici e multifunzionali (MD.P05.028.001) (Modulo)

Autore CNR di

• ROBERTO MANTOVAN (Unità di personale interno)
• ALESSIO LAMPERTI (Unità di personale interno)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Thin solid films (Rivista)

Editore di

• ELSEVIER SCIENCE SA LAUSANNE (Editore)

Insieme di parole chiave di

• Keywords of "Interface width evaluation in thin layered CoFeB/MgO multilayers including Ru or Ta buffer layer by X-ray reflectivity" (Insieme di parole chiave)