Electrical transport and depletion region in dry-etched Si-based nanostructures (Articolo in rivista)

Type
Label
  • Electrical transport and depletion region in dry-etched Si-based nanostructures (Articolo in rivista) (literal)
Anno
  • 2012-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1088/0268-1242/27/4/045016 (literal)
Alternative label
  • Cardile P, Franzo G, Krauss TF, Priolo F, O'Faolain L (2012)
    Electrical transport and depletion region in dry-etched Si-based nanostructures
    in Semiconductor science and technology (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Cardile P, Franzo G, Krauss TF, Priolo F, O'Faolain L (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 27 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 4 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • [ 1 ] CNR IMM UOS Catania, I-95123 Catania, Italy [ 2 ] Univ Catania, Dipartimento Fis & Astron, I-95123 Catania, Italy [ 3 ] Scuola Super Catania, I-95123 Catania, Italy [ 4 ] Univ St Andrews, Sch Phys & Astron, SUPA, St Andrews KY16 9SS, Fife, Scotland (literal)
Titolo
  • Electrical transport and depletion region in dry-etched Si-based nanostructures (literal)
Abstract
  • We fabricated p(+)-p-p(+) junctions in order to properly investigate the electrical conduction across a boron implanted silicon-on-insulator (SOI) nanostructured pattern, like photonic crystals and shallow-etched trenches. By analysis of the I-V measurements, we demonstrate that a depletion region is present and it is induced by the dry etching process of reactive ion etching. This depletion region does not depend on the geometry of the dry-etched nanostructure, but on the doping level of the substrate. (literal)
Prodotto di
Autore CNR
Insieme di parole chiave

Incoming links:


Autore CNR di
Prodotto
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
Insieme di parole chiave di
data.CNR.it