Fabrication and electromechanical actuation of epitaxial SrTiO3 (001) microcantilevers (Articolo in rivista)

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  • Fabrication and electromechanical actuation of epitaxial SrTiO3 (001) microcantilevers (Articolo in rivista) (literal)
Anno
  • 2013-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1088/0960-1317/23/3/035031 (literal)
Alternative label
  • Michele Biasotti 1,2, Luca Pellegrino 2, Renato Buzio 2, Emilio Bellingeri 2, Cristina Bernini 2, Antonio Sergio Siri 1,2, Daniele Marré 1,2 (2013)
    Fabrication and electromechanical actuation of epitaxial SrTiO3 (001) microcantilevers
    in Journal of micromechanics and microengineering (Print); IOP PUBLISHING LTD, BRISTOL BS1 6BE (Regno Unito)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Michele Biasotti 1,2, Luca Pellegrino 2, Renato Buzio 2, Emilio Bellingeri 2, Cristina Bernini 2, Antonio Sergio Siri 1,2, Daniele Marré 1,2 (literal)
Pagina inizio
  • 035031-1 (literal)
Pagina fine
  • 035031-10 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://iopscience.iop.org/0960-1317/23/3/035031/ (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 23 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 10 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 3 (literal)
Note
  • ISI Web of Science (WOS) (literal)
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  • 1 Dipartimento di Fisica, Università di Genova, via Dodecaneso 33, 16146 Genova, Italy 2 CNR-SPIN corso Perrone 24, 16152 Genova, Italy (literal)
Titolo
  • Fabrication and electromechanical actuation of epitaxial SrTiO3 (001) microcantilevers (literal)
Abstract
  • We report on the fabrication, mechanical characterization and electrostatic actuation of dielectric STO(0 0 1) thin film microcantilevers (MCs). Finite element analysis (FEA) is used for mechanical analysis and for calculating the distribution and the magnitude of the dielectric forces on the actual devices. The actuation of insulating oxide microstructures is of potential interest in the field of ferroelectric/multiferroic materials as well as for developing novel detecting schemes on dielectric oxides. (literal)
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