Electrostatic fluctuations in a direct current magnetron sputtering plasma (Articolo in rivista)

Type
Label
  • Electrostatic fluctuations in a direct current magnetron sputtering plasma (Articolo in rivista) (literal)
Anno
  • 2001-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1063/1.1369657 (literal)
Alternative label
  • Martines E.; Cavazzana R.; Serianni G.; Spolaore M.; Tramontin L.; Zuin M.; Antoni V. (2001)
    Electrostatic fluctuations in a direct current magnetron sputtering plasma
    in Physics of plasmas; American Institute Of Physics (AIP), Melville (Stati Uniti d'America)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Martines E.; Cavazzana R.; Serianni G.; Spolaore M.; Tramontin L.; Zuin M.; Antoni V. (literal)
Pagina inizio
  • 3042 (literal)
Pagina fine
  • 3050 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni
  • La rivista è pubblicata anche online con ISSN 1089-7674. (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://pop.aip.org/resource/1/phpaen/v8/i6/p3042_s1 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 8 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 9 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 6 (literal)
Note
  • ISI Web of Science (WOS) (literal)
  • Scopu (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Martines, E (Reprint Author), Consorzio RFX, Corso Stati Uniti 4, I-35127 Padua, Italy. 1,2,3,4,5,7: Consorzio RFX, I-35127 Padua, Italy. / - 2: INFM, Unita Padova, Sez A, Padua, Italy. 7 - 6: Univ Padua, Dipartimento Fis, I-35100 Padua, Italy. (literal)
Titolo
  • Electrostatic fluctuations in a direct current magnetron sputtering plasma (literal)
Abstract
  • Electrostatic fluctuations (up to 500 kHz) have been studied in a planar dc magnetron device using Langmuir probes measuring the floating potential and the ion saturation current. Fluctuation levels as high as 30% have been found inside the magnetic trap. A two-point spectral analysis has shown that the fluctuations are due to coherent modes with a low azimuthal mode number. The modes are present only when the discharge power and the neutral gas pressure are above a threshold. Their frequency spacing decreases when the neutral gas pressure is raised, so that increasing the pressure leads to a more turbulent state. The modes have been interpreted as unstable ExB/density gradient modes. (C) 2001 American Institute of Physics. (literal)
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