Novel method for the measure of STEM specimen thickness by HAADF imaging (Articolo in rivista)

Type
Label
  • Novel method for the measure of STEM specimen thickness by HAADF imaging (Articolo in rivista) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Alternative label
  • V. Grillo. E Carlino. (2008)
    Novel method for the measure of STEM specimen thickness by HAADF imaging
    in Springer proceedings in physics
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • V. Grillo. E Carlino. (literal)
Pagina inizio
  • 165 (literal)
Pagina fine
  • 168 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 120 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 4 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR, INFM, Lab Nacl TASC, Area Sci Pk,SS 14 KM 1635, I-34012 Trieste, Italy. (literal)
Titolo
  • Novel method for the measure of STEM specimen thickness by HAADF imaging (literal)
Abstract
  • The accurate measurement of chemistry of epitaxial layers by high angle annular dark field imaging requires knowledge of the scanning transmission electron microscopy specimen thickness. Here, it is shown how the study of the intensity of the Fourier coefficients of high angle annular dark field images, as a function of the objective lens defocus, can be used to measure the specimen thickness with the highest accuracy in the location of the area of interest. (literal)
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