High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates (Articolo in rivista)

Type
Label
  • High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates (Articolo in rivista) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Alternative label
  • F. Marsili; D. Bitauld; and A. Fiore; A. Gaggero; F. Mattioli; R. Leoni; M. Benkahoul; F. Levy (2008)
    High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates
    in Optics express
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • F. Marsili; D. Bitauld; and A. Fiore; A. Gaggero; F. Mattioli; R. Leoni; M. Benkahoul; F. Levy (literal)
Pagina inizio
  • 3191 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 16 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Istituto di Fotonica e Nanotecnologie, CNR, Via Cineto Romano 42, 00156 Roma, Italy Ecole Polytechnique Federale de Lausanne (EPFL), Institute of Photonics and Quantum Electronics (IPEQ), Station 3, CH-1015 Lausanne, Switzerland Ecole Polytechnique Federale de Lausanne (EPFL), Institute of Complex Matter Physics (IPMC), Station 3, CH-1015 Lausanne, Switzerland (literal)
Titolo
  • High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates (literal)
Abstract
  • We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150nm to 3nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400oC. SSPDs were fabricated on high quality NbN films of different thickness (7 to 3nm) deposited under optimal conditions. Electrical and optical characterizations were performed on the SSPDs. The highest QE value measured at 4.2K is 20% at 1300nm. (literal)
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