Synthesis of magnetic tunnel junctions with full in situ atomic layer and chemical vapor deposition processes (Articolo in rivista)

Type
Label
  • Synthesis of magnetic tunnel junctions with full in situ atomic layer and chemical vapor deposition processes (Articolo in rivista) (literal)
Anno
  • 2012-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.tsf.2011.08.037 (literal)
Alternative label
  • R. Mantovan, S. Vangelista, B. Kutrzeba-Kotowska, S. Cocco, A. Lamperti, G. Tallarida, D. Mameli, M. Fanciulli (2012)
    Synthesis of magnetic tunnel junctions with full in situ atomic layer and chemical vapor deposition processes
    in Thin solid films (Print); ELSEVIER SCIENCE SA, PO BOX 564, 1001 LAUSANNE (Svizzera)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • R. Mantovan, S. Vangelista, B. Kutrzeba-Kotowska, S. Cocco, A. Lamperti, G. Tallarida, D. Mameli, M. Fanciulli (literal)
Pagina inizio
  • 4820 (literal)
Pagina fine
  • 4822 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 520 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 14 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • IMM CNR, Lab MDM, I-20864 Agrate Brianza, MB, Italy Univ Cagliari, Dipartimento Sci Chim, I-09042 Cagliari, Italy Univ Milano Bicocca, Dipartimento Sci Mat, I-20125 Milan, Italy (literal)
Titolo
  • Synthesis of magnetic tunnel junctions with full in situ atomic layer and chemical vapor deposition processes (literal)
Abstract
  • Magnetic tunnel junctions, i.e. the combination of two ferromagnetic electrodes separated by an ultrathin tunnel oxide barrier, are core elements in a large variety of spin-based devices. We report on the use of combined chemical vapor and atomic layer deposition processes for the synthesis of magnetic tunnel junctions with no vacuum break. Structural, chemical and morphological characterizations of selected ferromagnetic and oxide layers are reported, together with the evidence of tunnel magnetoresistance effect in patterned Fe/MgO/Co junctions. (literal)
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