Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging (Articolo in rivista)

Type
Label
  • Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging (Articolo in rivista) (literal)
Anno
  • 2006-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.mejo.2005.10.012 (literal)
Alternative label
  • A. Caronti 1;G. Caliano 1; R. Carotenuto 1-3; A. Savoia1; M. Pappalardo1; E. Cianci 2; V. Foglietti 2: (2006)
    Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging
    in Microelectronics journal
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • A. Caronti 1;G. Caliano 1; R. Carotenuto 1-3; A. Savoia1; M. Pappalardo1; E. Cianci 2; V. Foglietti 2: (literal)
Pagina inizio
  • 770 (literal)
Pagina fine
  • 777 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 37 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1 Dip. di Ingegneria Elettronica, Universita` Roma Tre, Via della Vasca Navale 84, 00146 Roma, Italy ; 2 Istituto di Fotonica e Nanotecnologie IFN-CNR, Via Cineto Romano 42, 00156 Roma, Italy; 3 Dip. I.M.E.T., Universita` degli Studi 'Mediterranea' di Reggio Calabria, 89069 Reggio Calabria, Italy. (literal)
Titolo
  • Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging (literal)
Abstract
  • Capacitive micromachined ultrasonic transducers (CMUTs) bring the fabrication technology of standard integrated circuits into the field of ultrasound medical imaging. This unique property, combined with the inherent advantages of CMUTs in terms of increased bandwidth and suitability for new imaging modalities and high frequency applications, have indicated these devices as new generation arrays for acoustic imaging. The advances in microfabrication have made possible to fabricate, in few years, silicon-based electrostatic transducers competing in performance with the piezoelectric transducers. This paper summarizes the fabrication, design, modeling, and characterization of 1D CMUT linear arrays for medical imaging, established in our laboratories during the past 3 years. Although the viability of our CMUT technology for applications in diagnostic echographic imaging is demonstrated, the whole process from silicon die to final probe is not fully mature yet for successful practical applications. (literal)
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