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Properties of superconducting Nd1+xBa2-xCu3O7-delta thin films deposited by dc magnetron sputtering (Articolo in rivista)

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Properties of superconducting Nd1+xBa2-xCu3O7-delta thin films deposited by dc magnetron sputtering (Articolo in rivista) (literal)

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Salluzzo, M. and Maggio-Aprile, I. and Fischer, O. (1998)
Properties of superconducting Nd1+xBa2-xCu3O7-delta thin films deposited by dc magnetron sputtering
in Applied physics letters; American Institute of Physics, Melville [NY] (Stati Uniti d'America)
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Département de Physique de la Matiére Condensée, Université de Genève, CH-1211 Genève 4, Switzerland (literal)

Titolo

Properties of superconducting Nd1+xBa2-xCu3O7-delta thin films deposited by dc magnetron sputtering (literal)

Abstract

We report the superconducting properties of Nd1+xBa2-xCU3O7-delta thin films deposited by de magnetron sputtering from stoichiometric Nd1Ba2Cu3O7-delta and off-stoichiometric Nd1.12Ba1.88CU3O7-delta targets. Highly epitaxial c-axis oriented samples with thicknesses ranging from 5 to 100 nm were obtained on SrTiO3(100) substrates from both targets. A suppression of screw-dislocation mediated growth for off-stoichiometric films is observed by STM, resulting in smooth surfaces with roughness of 2-3 nm on a 1 mu m(2) area. The effects of the deposition conditions on the structural and superconducting properties are investigated and discussed in relation to the Nd-Ba substitution in the Nd1-xBa2-xCu3O7-delta system. (C) 1998 American Institute of Physics. (literal)

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