http://www.cnr.it/ontology/cnr/individuo/prodotto/ID24687
Capacitive micromachined ultrasonic transducer with an open-cells structure (Articolo in rivista)
- Type
- Label
- Capacitive micromachined ultrasonic transducer with an open-cells structure (Articolo in rivista) (literal)
- Anno
- 2005-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1016/j.sna.2005.03.045 (literal)
- Alternative label
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Giosuè Caliano 1; Alessandro Savoia 1; Alessandro Caronti 1; Vittorio Foglietti 2; Elena Cianci 2; Massimo Pappalardo 1. (literal)
- Pagina inizio
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Note
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- 1 Dipartimento di Ingegneria Elettronica, Universitá Roma Tre, Roma, Italy
2 Istituto di Fotonica e Nanotecnologie - CNR, Roma, Italy (literal)
- Titolo
- Capacitive micromachined ultrasonic transducer with an open-cells structure (literal)
- Abstract
- The capacitive micromachined ultrasonic transducer (cMUT) has proved to be a viable alternative to the classical piezoelectric transducer in many practical applications like medical diagnostic and non-destructive testing. A cMUT consists of an array of closed electrostatic microcells obtained by surface micromachining a silicon substrate.
In this paper, we present an electrostatic transducer made with an open-cell structure which shows many potential advantages over the closed-cell structure of the cMUT. Finite element model predictions together with experimental evidence demonstrate the viability of this approach to the electro-acoustic energy conversion in the MHz range. (literal)
- Prodotto di
- Autore CNR
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- Autore CNR di
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