http://www.cnr.it/ontology/cnr/individuo/prodotto/ID246740
Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet radiation (Articolo in rivista)
- Type
- Label
- Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet radiation (Articolo in rivista) (literal)
- Anno
- 2013-01-01T00:00:00+01:00 (literal)
- Alternative label
Corso, AJ (Corso, Alain Jody)[ 1,2 ] ; Zuppella, P (Zuppella, Paola)[ 1 ] ; Barkusky, F (Barkusky, Frank)[ 3,4 ] ; Mann, K (Mann, Klaus)[ 3 ] ; Muller, M (Mueller, Matthias)[ 3 ] ; Nicolosi, P (Nicolosi, Piergiorgio)[ 1,2 ] ; Nardello, M (Nardello, Marco)[ 1,2 ] ; Pelizzo, MG (Pelizzo, Maria Guglielmina)[ 1,2 ] (2013)
Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet radiation
in Journal of applied physics
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Corso, AJ (Corso, Alain Jody)[ 1,2 ] ; Zuppella, P (Zuppella, Paola)[ 1 ] ; Barkusky, F (Barkusky, Frank)[ 3,4 ] ; Mann, K (Mann, Klaus)[ 3 ] ; Muller, M (Mueller, Matthias)[ 3 ] ; Nicolosi, P (Nicolosi, Piergiorgio)[ 1,2 ] ; Nardello, M (Nardello, Marco)[ 1,2 ] ; Pelizzo, MG (Pelizzo, Maria Guglielmina)[ 1,2 ] (literal)
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- Pagina fine
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- Rivista
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- [ 1 ] Natl Res Council Italy, Inst Photon & Nanotechnol, I-35131 Padua, Italy
[ 2 ] Univ Padua, Dept Informat Engn, I-35131 Padua, Italy
Organization-Enhanced Name(s)
University of Padua
[ 3 ] Laser Lab Gottingen eV, Gottingen, Germany
Organization-Enhanced Name(s)
University of Gottingen
[ 4 ] KLA Tencor, Milpitas, CA 95035 USA (literal)
- Titolo
- Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet radiation (literal)
- Prodotto di
- Autore CNR
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