Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet radiation (Articolo in rivista)

Type
Label
  • Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet radiation (Articolo in rivista) (literal)
Anno
  • 2013-01-01T00:00:00+01:00 (literal)
Alternative label
  • Corso, AJ (Corso, Alain Jody)[ 1,2 ] ; Zuppella, P (Zuppella, Paola)[ 1 ] ; Barkusky, F (Barkusky, Frank)[ 3,4 ] ; Mann, K (Mann, Klaus)[ 3 ] ; Muller, M (Mueller, Matthias)[ 3 ] ; Nicolosi, P (Nicolosi, Piergiorgio)[ 1,2 ] ; Nardello, M (Nardello, Marco)[ 1,2 ] ; Pelizzo, MG (Pelizzo, Maria Guglielmina)[ 1,2 ] (2013)
    Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet radiation
    in Journal of applied physics
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Corso, AJ (Corso, Alain Jody)[ 1,2 ] ; Zuppella, P (Zuppella, Paola)[ 1 ] ; Barkusky, F (Barkusky, Frank)[ 3,4 ] ; Mann, K (Mann, Klaus)[ 3 ] ; Muller, M (Mueller, Matthias)[ 3 ] ; Nicolosi, P (Nicolosi, Piergiorgio)[ 1,2 ] ; Nardello, M (Nardello, Marco)[ 1,2 ] ; Pelizzo, MG (Pelizzo, Maria Guglielmina)[ 1,2 ] (literal)
Pagina inizio
  • 203106-1 (literal)
Pagina fine
  • 203106-6 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 113 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 20 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • [ 1 ] Natl Res Council Italy, Inst Photon & Nanotechnol, I-35131 Padua, Italy [ 2 ] Univ Padua, Dept Informat Engn, I-35131 Padua, Italy Organization-Enhanced Name(s) University of Padua [ 3 ] Laser Lab Gottingen eV, Gottingen, Germany Organization-Enhanced Name(s) University of Gottingen [ 4 ] KLA Tencor, Milpitas, CA 95035 USA (literal)
Titolo
  • Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet radiation (literal)
Prodotto di
Autore CNR

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