Fabrication of low loss MOMS resonators for quantum optics experiments (Articolo in rivista)

Type
Label
  • Fabrication of low loss MOMS resonators for quantum optics experiments (Articolo in rivista) (literal)
Anno
  • 2013-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1088/0960-1317/23/8/085010 (literal)
Alternative label
  • E. Serra (1,2,3); A. Bagolini (4); A. Borrielli (2,5); M. Boscardin (4); F.S. Cataliotti (6,7,8); F. Marin (6,7,8); F. Marino (6,7,9); A.Pontin (2,10); G.A. Prodi (2,10); M. Vannoni (11); M. Bonaldi (2,5) (2013)
    Fabrication of low loss MOMS resonators for quantum optics experiments
    in Journal of micromechanics and microengineering (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • E. Serra (1,2,3); A. Bagolini (4); A. Borrielli (2,5); M. Boscardin (4); F.S. Cataliotti (6,7,8); F. Marin (6,7,8); F. Marino (6,7,9); A.Pontin (2,10); G.A. Prodi (2,10); M. Vannoni (11); M. Bonaldi (2,5) (literal)
Pagina inizio
  • art_n_ 085010 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://iopscience.iop.org/0960-1317/23/8/085010 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 23 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 12 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 8 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • (1) Interdisciplinary Laboratory for Computational Science (LISC), FBK-University of Trento, I-38123 Povo (Trento), Italy (2) INFN, Gruppo Collegato di Trento, Sezione di Padova, I-38123 Povo, Trento, Italy (3) Department of Microelectronics and Computer, Engineering/ECTM/DIMES, Feldmanweg, 17-2628 CT Delft, PO Box 5053, 2600 GB Delft, The Netherlands (4) Microtechnology Laboratory FBK-CMM, I-38123 Povo, Trento, Italy (5) Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, I-38123 Povo, Trento, Italy (6) European Laboratory for Non-Linear Spectroscopy (LENS), Via Carrara 1, I-50019 Sesto Fiorentino (FI), Italy (7) INFN, Sezione di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy (8) Dipartimento di Fisica e Astronomia, Università di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy (9) CNR-Istituto dei Sistemi Complessi, Via Madonna del Piano 10, I-50019 Sesto Fiorentino (FI), Italy (10) Dipartimento di Fisica, Università di Trento, I-38123 Povo (TN), Italy (11) Istituto Nazionale di Ottica-CNR, Largo Fermi 6, I-50125 Firenze, Italy (literal)
Titolo
  • Fabrication of low loss MOMS resonators for quantum optics experiments (literal)
Abstract
  • We present the fabrication and characterization of opto-mechanical micro-resonators developed to detect radiation-pressure coupling between light and a macroscopic body. The major achievements of this work are the development of complex high aspect ratio shapes by using the deep-RIE Bosch process and the integration of a high-reflectivity dielectric mirror. The micro-resonators were used as an end-mirror of a Fabry-Perot cavity, attaining an optical finesse of about 6 × 104, and at cryogenic temperature (about 10 K) we measured a mechanical quality factor up to 2 × 106 at about 90 kHz. These features make our devices particularly suitable for experiments on quantum-opto-mechanics. (literal)
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