Dynamics of Micromechanical Capacitive Shunt Switches (Contributo in atti di convegno)

Type
Label
  • Dynamics of Micromechanical Capacitive Shunt Switches (Contributo in atti di convegno) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Alternative label
  • Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Daniele Comastri (2008)
    Dynamics of Micromechanical Capacitive Shunt Switches
    in 9th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2008, Heraklion, Greece, 30th June - 3rd July 2008
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Daniele Comastri (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://books.google.it/books/about/MEMSWAVE_2008.html?id=7pC8jwEACAAJ&redir_esc=y (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume
  • Proceedings of the 9th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2008 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 4 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM Roma (literal)
Titolo
  • Dynamics of Micromechanical Capacitive Shunt Switches (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autoriVolume
  • AA.VV. (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#curatoriVolume
  • Editor: George Konstantinidis (literal)
Abstract
  • Abstract -- An analytical approach based on unidimensional equations has been settled up for studying the dynamics of RF MEMS switches. The model has been developed until now especially for shunt capacitive configurations, to predict the capacitance change and actuation times during the actuation and de-actuation mechanisms, and it has been implemented by means of a MATHCAD program. Successively, two- and three-dimensional models based on a commercial software package, namely COMSOL Multiphysics, using equations about energy conservation and boundary conditions, has been used to validate the analytical one and to clearly identify the limits and advantages of a fully analytical formulation. The dynamical response of a capacitive shunt switch has been considered, but the approach is generally valid for resistive series as well as for capacitive shunt devices, because they refer to a double clamped beam, independently of the electrical configuration. (literal)
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