Characterization of MIM Capacitors for the Investigation of RF MEMS Switch Charging Effects (Contributo in atti di convegno)

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  • Characterization of MIM Capacitors for the Investigation of RF MEMS Switch Charging Effects (Contributo in atti di convegno) (literal)
Anno
  • 2009-01-01T00:00:00+01:00 (literal)
Alternative label
  • Giorgio De Angelis, Andrea Lucibello, Flavio Giacomozzi, Benno Margesin, Giancarlo Bartolucci, Romolo Marcelli (2009)
    Characterization of MIM Capacitors for the Investigation of RF MEMS Switch Charging Effects
    in 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009, Trento, 6 - 8 July 2009
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Giorgio De Angelis, Andrea Lucibello, Flavio Giacomozzi, Benno Margesin, Giancarlo Bartolucci, Romolo Marcelli (literal)
Pagina inizio
  • 121 (literal)
Pagina fine
  • 124 (literal)
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  • http://memswave09.fbk.eu/ (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume
  • Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 (literal)
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  • 4 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM Roma FBK-irst, Trento University of Roma \"Tor Vergata\" (literal)
Titolo
  • Characterization of MIM Capacitors for the Investigation of RF MEMS Switch Charging Effects (literal)
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  • AA.VV. (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#curatoriVolume
  • Editor: F. Giacomozzi (literal)
Abstract
  • Abstract -- MIM capacitors made by the same structures and materials commonly used for the actuation of RF MEMS switches have been systematically investigated, to get information about the charging effects induced by the actuation pads. (literal)
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