http://www.cnr.it/ontology/cnr/individuo/prodotto/ID245168
RF MEMS ohmic switches for matrix configurations (Contributo in atti di convegno)
- Type
- Label
- RF MEMS ohmic switches for matrix configurations (Contributo in atti di convegno) (literal)
- Anno
- 2010-01-01T00:00:00+01:00 (literal)
- Alternative label
G. De Angelis, A. Lucibello, F. Casini, P. Farinelli, G. Mannocchi, S. Di Nardo, B. Margesin, F. Giacomozzi, O. Vendier, L.Vietzorreck, E. Proietti, and R. Marcelli (2010)
RF MEMS ohmic switches for matrix configurations
in 11th International Symposium on RF MEMS and RF Microsystems, paper MEMS_S1_2, MEMSWAVE 2010, Otranto, June 28-29-30, 2010
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- G. De Angelis, A. Lucibello, F. Casini, P. Farinelli, G. Mannocchi, S. Di Nardo, B. Margesin, F. Giacomozzi, O. Vendier, L.Vietzorreck, E. Proietti, and R. Marcelli (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
- http://www.memswave2010.unisalento.it/ (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume
- Proceedings of the 11th International Symposium on RF MEMS and RF Microsystems (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- CNR-IMM Roma
University of Perugia
TAS-I, Roma and L'Aquila
TAS-F, Toulouse, France
FBK-irst, Trento
TUM, Munchen, Germany (literal)
- Titolo
- RF MEMS ohmic switches for matrix configurations (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autoriVolume
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#curatoriVolume
- Editors: Luciano Tarricone and Fabio Coccetti (literal)
- Abstract
- Two different topologies of RF MEMS series ohmic
switches (cantilever and clamped - clamped beams) in Coplanar
Waveguide (CPW) configuration have been characterized by means
of DC, environmental and RF measurements. The devices have been
manufactured on High Resistivity (HR) Silicon substrates, as
building blocks to be implemented in different Single-Pole 4-Throw
(SP4T), Double-Pole Double-Throw (DPDT) configurations and then
integrated in LTCC technology for the realization of Large Order
Clos 3D networks. (literal)
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