RF MEMS ohmic switches for matrix configurations (Articolo in rivista)

Type
Label
  • RF MEMS ohmic switches for matrix configurations (Articolo in rivista) (literal)
Anno
  • 2012-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1017/S1759078712000074 (literal)
Alternative label
  • De Angelis, G.a, Lucibello, A.a, Proietti, E.a, Marcelli, R.a , Bartolucci, G.ag, Casini, F.b, Farinelli, P.b, Mannocchi, G.c, Di Nardo, S.c, Pochesci, D.c, Margesin, B.d, Giacomozzi, F.d, Vendier, O.e, Kim, T.f, Vietzorreck, L.f (2012)
    RF MEMS ohmic switches for matrix configurations
    in International journal of microwave and wireless technologies (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • De Angelis, G.a, Lucibello, A.a, Proietti, E.a, Marcelli, R.a , Bartolucci, G.ag, Casini, F.b, Farinelli, P.b, Mannocchi, G.c, Di Nardo, S.c, Pochesci, D.c, Margesin, B.d, Giacomozzi, F.d, Vendier, O.e, Kim, T.f, Vietzorreck, L.f (literal)
Pagina inizio
  • 421 (literal)
Pagina fine
  • 433 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 4 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 13 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 4 (literal)
Note
  • Scopu (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • a CNR-IMM Roma, Via Fosso del cavaliere 100, 00133, Roma, Italy b Department of Electronic Engineering, University of Perugia, Via G. Duranti 93, 06125 Perugia, Italy c THALES ALENIA SPACE Italia, Via Saccomuro 24, 00131 Roma, Italy d FBK-Center for Materials and Microsystems - Irst, Via Sommarive 18, Povo 38100, Trento, Italy e THALES ALENIA SPACE France, Toulouse, France f Technische Universität München, Arcisstrasse 21, 80333 München, Germany g Department of Electronic Engineering, University of Roma Tor Vergata, Via del Politecnico 1, 00133 Roma, Italy (literal)
Titolo
  • RF MEMS ohmic switches for matrix configurations (literal)
Abstract
  • Two different topologies of radio frequency micro-electro-mechanical system (RF MEMS) series ohmic switches (cantilever and clamped-clamped beams) in coplanar waveguide (CPW) configuration have been characterized by means of DC, environmental, and RF measurements. In particular, on-wafer checks have been followed by RF test after vibration, thermal shocks, and temperature cycles. The devices have been manufactured on high resistivity silicon substrates, as building blocks to be implemented in different single-pole 4-throw (SP4 T), double-pole double-throw (DPDT) configurations, and then integrated in Low Temperature Co-fired Ceramics (LTCC) technology for the realization of large-order Clos 3D networks. (literal)
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