Growth of piezoelectric thin films with fine grain microstructure by high energy pulsed laser deposition (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Growth of piezoelectric thin films with fine grain microstructure by high energy pulsed laser deposition (Articolo in rivista) (literal)

Anno

• 1999-01-01T00:00:00+01:00 (literal)

Alternative label

• Craciun F., Verardi P., Dinescu M., Galassi C., Costa A. (1999)
  Growth of piezoelectric thin films with fine grain microstructure by high energy pulsed laser deposition
  in Sensors and actuators. A, Physical (Print); ELSEVIER SCIENCE SA, PO BOX 564, 1001 LAUSANNE (Svizzera)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Craciun F., Verardi P., Dinescu M., Galassi C., Costa A. (literal)

Pagina inizio

• 35 (literal)

Pagina fine

• 40 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 74 (literal)

Rivista

• Sensors and actuators. A, Physical (Rivista)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR- ISC Laser Department, INFPLR, P.O. Box MG 16, RO-76900, Romania CNR-ISTEC (literal)

Titolo

• Growth of piezoelectric thin films with fine grain microstructure by high energy pulsed laser deposition (literal)

Abstract

• Thin piezoelectric films of lead zirconate-titanate (PZT). were deposited by pulsed laser ablation from prepared PZT targets and compared with films obtained from commercial samples. The special targets were obtained from nanosized powders synthesised by spray-drying of precursor solution and sintered at 700°C. The depositions were performed on Si (100). substrates carefully cleaned and heated in a vacuum chamber at 400°C. The same experimental set-up (Nd-YAG laser, 0.3 Jrpulse, 1064 nm, 10 ns, 10 Hz.) and parameters (reactive O2 atmosphere of pressure 150 mTorr, substrate temperature 370°C)were used for all the films. After deposition samples were investigated by X-ray diffraction, scanning electron microscopy and energy dispersive spectroscopy (EDS). Similar analysis were performed on targets before and after deposition. It has been observed that the evolution of the two types of targets during deposition was very different and this aspect was reflected in differences of film morphologies. Films deposited from special targets presented an uniform fine grained microstructure with only few particulates on surface, while films deposited from commercial targets had a much rougher surface. EDS analysis showed important chemical differences between these particulates and the surrounding film (literal)

Editore

• ELSEVIER SCIENCE SA (Editore)

Prodotto di

• Institute of science and technology for ceramics (ISTEC) (Istituto)
• Processi e materiali per applicazioni elettromeccaniche (SP.P02.009.001) (Modulo)

Autore CNR

• PATRIZIO VERARDI (Persona)
• CARMEN GALASSI (Unità di personale interno)
• ANNA LUISA COSTA (Persona)
• FLORIANA RUSANESCU CRACIUN (Unità di personale interno)

Incoming links:

Prodotto

• Institute of science and technology for ceramics (ISTEC) (Istituto)
• Processi e materiali per applicazioni elettromeccaniche (SP.P02.009.001) (Modulo)

Autore CNR di

• CARMEN GALASSI (Unità di personale interno)
• FLORIANA RUSANESCU CRACIUN (Unità di personale interno)
• PATRIZIO VERARDI (Persona)
• ANNA LUISA COSTA (Persona)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Sensors and actuators. A, Physical (Rivista)

Editore di

• ELSEVIER SCIENCE SA (Editore)