Diagnostics and modelling of radiofrequency and microwave plasmas of CH4-Ar mixtures for deposition of carbon-based films. (Rapporti finali progetti di ricerca)

Type
Label
  • Diagnostics and modelling of radiofrequency and microwave plasmas of CH4-Ar mixtures for deposition of carbon-based films. (Rapporti finali progetti di ricerca) (literal)
Anno
  • 2006-01-01T00:00:00+01:00 (literal)
Alternative label
  • G. Cicala, M. Capitelli (2006)
    Diagnostics and modelling of radiofrequency and microwave plasmas of CH4-Ar mixtures for deposition of carbon-based films.
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • G. Cicala, M. Capitelli (literal)
Pagina inizio
  • 1 (literal)
Pagina fine
  • 7 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 7 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • IMIP-CNR Via Amendola 122/D, 70126 Bari (literal)
Titolo
  • Diagnostics and modelling of radiofrequency and microwave plasmas of CH4-Ar mixtures for deposition of carbon-based films. (literal)
Prodotto di
Autore CNR

Incoming links:


Prodotto
Autore CNR di
data.CNR.it