http://www.cnr.it/ontology/cnr/individuo/prodotto/ID233217
XPS composition study of stacked Si oxide/Si nitride/Si oxide nano-layers (Articolo in rivista)
- Type
- Label
- XPS composition study of stacked Si oxide/Si nitride/Si oxide nano-layers (Articolo in rivista) (literal)
- Anno
- 2012-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1002/sia.4943 (literal)
- Alternative label
E. Ravizza, S. Spadoni, R. Piagge, P. Comite, C. Wiemer (2012)
XPS composition study of stacked Si oxide/Si nitride/Si oxide nano-layers
in Surface and interface analysis (Online)
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- E. Ravizza, S. Spadoni, R. Piagge, P. Comite, C. Wiemer (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- Micron, Proc R&D, I-20864 Agrate Brianza, MB, Italy
IMM CNR, Lab MDM, I-20864 Agrate Brianza, MB, Italy (literal)
- Titolo
- XPS composition study of stacked Si oxide/Si nitride/Si oxide nano-layers (literal)
- Abstract
- X-ray Photoelectron Spectroscopy (XPS) was used to investigate the silicon nitride composition in stacked Si oxide/Si nitride/Si oxide nano-layers. The standard approach for stoichiometry estimation, valid for homogeneous compositions, was corrected for the case of very small thickness and thin overlayer. (literal)
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