MOCVD Growth of Rare Earth Oxides: The Case of the Praseodymium/Oxygen System (Contributo in volume (capitolo o saggio))

Type

• Prodotto della ricerca (Classe)
• Contributo in volume (capitolo o saggio) (Classe)

Label

• MOCVD Growth of Rare Earth Oxides: The Case of the Praseodymium/Oxygen System (Contributo in volume (capitolo o saggio)) (literal)

Anno

• 2007-01-01T00:00:00+01:00 (literal)

Alternative label

• Raffaella Lo Nigro, Graziella Malandrino, Roberta G. Toro, and Ignazio L. Fragalà (2007)
  MOCVD Growth of Rare Earth Oxides: The Case of the Praseodymium/Oxygen System
  in Rare Earth Oxide Thin Films, 2007
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Raffaella Lo Nigro, Graziella Malandrino, Roberta G. Toro, and Ignazio L. Fragalà (literal)

Pagina inizio

• 33 (literal)

Pagina fine

• 51 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume

• Rare Earth Oxide Thin Films (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#volumeInCollana

• 106 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR-IMM, Stradale Primosole 50, 95127 Catania, Italy Chemistry Department, University of Catania, Viale A. Doria 6, 95125 Catania, (literal)

Titolo

• MOCVD Growth of Rare Earth Oxides: The Case of the Praseodymium/Oxygen System (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn

• 978-3-540-35796-4 (literal)

Abstract

• Chemical Vapor Deposition (CVD) uses one or more gaseous species (precursors) to form on a substrate, solid phase materials through an activated process. While today a large variety of precursors is known and rather complex deposition routes are involved, a user-friendly classification of precursor compounds as well as a viable discussion of their physical and chemical characteristics can be useful to MOCVD practitioners. In this Chapter, an overview of both the exploitation and challenges of MOCVD fabrication of praseodymium oxides will be highlighted from different points of view, including the more suited precursors, the synthesis of thin films and their stability on silicon substrates. (literal)

Prodotto di

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Materiali multifunzionali, e innovativi per componenti integrati (MD.P05.003.002) (Modulo)

Autore CNR

• RAFFAELLA LO NIGRO (Persona)
• ROBERTA GRAZIA TORO (Unità di personale interno)

Incoming links:

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Materiali multifunzionali, e innovativi per componenti integrati (MD.P05.003.002) (Modulo)

Autore CNR di

• RAFFAELLA LO NIGRO (Persona)
• ROBERTA GRAZIA TORO (Unità di personale interno)