http://www.cnr.it/ontology/cnr/individuo/prodotto/ID222490
X-ray absorption spectroscopy study of Yb2O3and Lu2O3 thin films deposited on Si(100) by atomic layer deposition (Articolo in rivista)
- Type
- Label
- X-ray absorption spectroscopy study of Yb2O3and Lu2O3 thin films deposited on Si(100) by atomic layer deposition (Articolo in rivista) (literal)
- Anno
- 2006-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1016/j.nimb.2005.12.020 (literal)
- Alternative label
M. Malvestuto, G. Scarel, C. Wiemer, M. Fanciulli, F. D'Acapito, F. Boscherini (2006)
X-ray absorption spectroscopy study of Yb2O3and Lu2O3 thin films deposited on Si(100) by atomic layer deposition
in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (Print)
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- M. Malvestuto, G. Scarel, C. Wiemer, M. Fanciulli, F. D'Acapito, F. Boscherini (literal)
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- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- hysics Department and INFM, University of Bologna, viale C. Berti Pichat 6/2, 40127 Bologna, Italy
b
Laboratorio Nazionale MDM-INFM,Via C. Olivetti 2, 20041 Agrate Brianza (MI), Italy
c
INFM-OGG, C/o ESRF, BP 220, 38043 Grenoble, France (literal)
- Titolo
- X-ray absorption spectroscopy study of Yb2O3and Lu2O3 thin films deposited on Si(100) by atomic layer deposition (literal)
- Abstract
- Using X-ray absorption spectroscopy we have investigated the local structure of Yb2O3and Lu2O3thin films deposited on Si(100) by
means of atomic layer deposition. These two oxides, as well as those of the other rare earth elements, are considered among the high dielec-tric constant materials candidates to substitute SiO2in ultra-scaled CMOS devices. We find that the films maintain the overall bixbyite
structure of the bulk oxides, but exhibit significant distortions of the local structure depending on thickness and thermal treatment.
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