Gas-phase FT-IR analysis and growth kinetics of Al2O3 in a LP-MOCVD reactor using new dialkylacetylacetonate precursors (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Gas-phase FT-IR analysis and growth kinetics of Al2O3 in a LP-MOCVD reactor using new dialkylacetylacetonate precursors (Articolo in rivista) (literal)

Anno

• 1999-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1051/jp4:1999885 (literal)

Alternative label

• Battiston G.A.; Carta G.; Gerbasi R.; Porchia M.; Rizzo L.; Rossetto, G. (1999)
  Gas-phase FT-IR analysis and growth kinetics of Al2O3 in a LP-MOCVD reactor using new dialkylacetylacetonate precursors
  in Journal de physique. IV
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Battiston G.A.; Carta G.; Gerbasi R.; Porchia M.; Rizzo L.; Rossetto, G. (literal)

Pagina inizio

• Pr8-675 (literal)

Pagina fine

• Pr8-681 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni

• Conference: 12th European Conference on Chemical Vapour Deposition Location: BARCELONA, SPAIN Date: SEP 05-10, 1999 Sponsor(s): Elect Soc; Gen Catalunya Dept Presidencia Comm Univ Recerca; ICMAB; CSIC; ISCAR New Line; INORGTECH; CND (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://jp4.journaldephysique.org/articles/jp4/abs/1999/08/jp4199909PR885/jp4199909PR885.html (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 9 (literal)

Rivista

• Journal de physique. IV (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 7 (literal)

Note

• ISI Web of Science (WOS) (literal)
• Scopu (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR, Ist Chim & Tecnol Inorgan & Mat Avanzati, Corso Stati Uniti 4, I-35127 Padua, Italy (literal)

Titolo

• Gas-phase FT-IR analysis and growth kinetics of Al2O3 in a LP-MOCVD reactor using new dialkylacetylacetonate precursors (literal)

Abstract

• Gas-phase FT-IR spectroscopy has been employed to study the thermal decomposition of dialkylacetylacetonate aluminium (alkyl = methyl, ethyl and iso-buthyl) in a hot-wall LP-MOCVD (low-pressure metal organic chemical vapour deposition) system. On the basis of such preliminary data, growths of alumina have been carried out using methyl- and ethyl derivatives in a spread range of experimental conditions: reactor temperature 400-520°C and total pressure 100-400 Pa. Aluminium oxide films have been grown in a nitrogen atmosphere either in the presence of oxygen or water vapour. In both cases the obtained films are amorphous, smooth and well adherent, but they are black in the first case, transparent and slightly yellowish in the second one. A simple theoretical kinetic model was applied to analyse and rationalise the experimental data related to the diethylacetylacetonate aluminium precursor. The model well predicts the deposition rates attributed to the rate determining step of the heterogeneous process with an activation energy of 97 kJ mol-1 in the presence of oxygen, and 49 kJ mol-1 in the presence of water vapour. (literal)

Prodotto di

• Istituto di chimica inorganica e delle superfici (ICIS) (Istituto)

Autore CNR

• MARINA PORCHIA (Unità di personale interno)
• ROSALBA GERBASI (Unità di personale interno)
• GILBERTO LUCIO ROSSETTO (Persona)

Insieme di parole chiave

• Parole chiave di "Gas-phase FT-IR analysis and growth kinetics of Al2O3 in a LP-MOCVD reactor using new dialkylacetylacetonate precursors" (Insieme di parole chiave)

Incoming links:

Prodotto

• Istituto di chimica inorganica e delle superfici (ICIS) (Istituto)

Autore CNR di

• GILBERTO LUCIO ROSSETTO (Persona)
• MARINA PORCHIA (Unità di personale interno)
• ROSALBA GERBASI (Unità di personale interno)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Journal de physique. IV (Rivista)

Insieme di parole chiave di

• Parole chiave di "Gas-phase FT-IR analysis and growth kinetics of Al2O3 in a LP-MOCVD reactor using new dialkylacetylacetonate precursors" (Insieme di parole chiave)