http://www.cnr.it/ontology/cnr/individuo/prodotto/ID21587
Laser deposition of shape-memory alloy for MEMS applications (Articolo in rivista)
- Type
- Label
- Laser deposition of shape-memory alloy for MEMS applications (Articolo in rivista) (literal)
- Anno
- 2003-01-01T00:00:00+01:00 (literal)
- Alternative label
Fuso F., Tuissi A., Camposeo A., Puccini N., Allegrini M., Arimondo E. (2003)
Laser deposition of shape-memory alloy for MEMS applications
in Applied surface science
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Fuso F., Tuissi A., Camposeo A., Puccini N., Allegrini M., Arimondo E. (literal)
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- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Note
- ISI Web of Science (WOS) (literal)
- Titolo
- Laser deposition of shape-memory alloy for MEMS applications (literal)
- Abstract
- We have coated, by laser deposited NiTi films, Si-based cantilevers, of the kind commercially available as atomic force microscopy probes. The samples exhibited peculiar mechanical features ascribed to combination of shape-memory and bimetal effects. Our findings demonstrate the capabilities of laser deposition in fabricating metal alloys, and, at the same time, open the way to a simple process for the fabrication of basic components in microelectromechanical systems. (literal)
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- Autore CNR
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