Laser deposition of shape-memory alloy for MEMS applications (Articolo in rivista)

Type
Label
  • Laser deposition of shape-memory alloy for MEMS applications (Articolo in rivista) (literal)
Anno
  • 2003-01-01T00:00:00+01:00 (literal)
Alternative label
  • Fuso F., Tuissi A., Camposeo A., Puccini N., Allegrini M., Arimondo E. (2003)
    Laser deposition of shape-memory alloy for MEMS applications
    in Applied surface science
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Fuso F., Tuissi A., Camposeo A., Puccini N., Allegrini M., Arimondo E. (literal)
Pagina inizio
  • 518 (literal)
Pagina fine
  • 521 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 208- (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Titolo
  • Laser deposition of shape-memory alloy for MEMS applications (literal)
Abstract
  • We have coated, by laser deposited NiTi films, Si-based cantilevers, of the kind commercially available as atomic force microscopy probes. The samples exhibited peculiar mechanical features ascribed to combination of shape-memory and bimetal effects. Our findings demonstrate the capabilities of laser deposition in fabricating metal alloys, and, at the same time, open the way to a simple process for the fabrication of basic components in microelectromechanical systems. (literal)
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