Fabrication of Smooth Ridge Optical Waveguides in LiNbO3 by Ion Implantation-Assisted Wet Etching (Articolo in rivista)

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  • Fabrication of Smooth Ridge Optical Waveguides in LiNbO3 by Ion Implantation-Assisted Wet Etching (Articolo in rivista) (literal)
Anno
  • 2013-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1109/JLT.2013.2252881 (literal)
Alternative label
  • P. De Nicola, S. Sugliani, G. B. Montanari, A. Menin, P. Vergani, A. Meroni, M. Astolfi, M. Borsetto, G. Consonni, R. Longone, A. Nubile, M. Chiarini, M. Bianconi, and G. G. Bentini (2013)
    Fabrication of Smooth Ridge Optical Waveguides in LiNbO3 by Ion Implantation-Assisted Wet Etching
    in Journal of lightwave technology (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • P. De Nicola, S. Sugliani, G. B. Montanari, A. Menin, P. Vergani, A. Meroni, M. Astolfi, M. Borsetto, G. Consonni, R. Longone, A. Nubile, M. Chiarini, M. Bianconi, and G. G. Bentini (literal)
Pagina inizio
  • 1 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 31 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 9 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • MIST E-R scrl, CNR-IMM, CGS SpA, Oclaro North America Inc (literal)
Titolo
  • Fabrication of Smooth Ridge Optical Waveguides in LiNbO3 by Ion Implantation-Assisted Wet Etching (literal)
Abstract
  • Very smooth reliefmicrostructures were fabricated in X-cut Lithium Niobate by using an improved ion implantation-assisted wet etching technique. The substrates were implanted with 5 MeV Cu ions at a fluence of 1E15 /cm2 through a masking layer. Three kinds of layers were patterned and tested: Au, positive photoresist and SU-8 negative photoresist. The damaged regions were then etched with a HF solution at a rate of 100 nm/s. The process can be repeated to obtain higher aspect ratios. The relief structures fabricated with this technology are presented and discussed. In order to explore a possible application of our technique optical waveguides were created in the best quality structures by means of a multi-step carbon ion implantation process with ten different energies followed by an annealing at 280 for 30 minutes. In this way a step-like enhanced extraordinary refractive index profile was obtained inside the ridges extending from surface to a depth of 2.75 m.Optical characterization@660 nm of the waveguides yielded a propagation loss of 0.23 0.09 dB/cm. The very good results of the best structures make them very promising for integrated optics and acousto/opto-fluidics. (literal)
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