Acoustic Characterization of TiO2 Film for humidity Sensors Applications (Contributo in atti di convegno)

Type
Label
  • Acoustic Characterization of TiO2 Film for humidity Sensors Applications (Contributo in atti di convegno) (literal)
Anno
  • 1999-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1117/12.341169 (literal)
Alternative label
  • C. CALIENDO, E. VERONA (1999)
    Acoustic Characterization of TiO2 Film for humidity Sensors Applications
    in Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, Paris, 30 March 1999 through 1 April 1999
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • C. CALIENDO, E. VERONA (literal)
Pagina inizio
  • 1006 (literal)
Pagina fine
  • 1013 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni
  • ISSN: 0277786X CODEN: PSISD IDS Number: BN52D ISSN: 0277-786X (literal)
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  • http://dx.doi.org/10.1117/12.341169 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume
  • Design, Test, and Microfabrication of MEMS and MOEMS (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#volumeInCollana
  • 3680 (literal)
Note
  • ISI Web of Science (WOS) (literal)
  • Scopu (literal)
  • SCImago (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • C.N.R Istituto di Acustica O.MCorbino, Via del Foss0 del Cavaliere, 100 I40133 Roma, Italy (literal)
Titolo
  • Acoustic Characterization of TiO2 Film for humidity Sensors Applications (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn
  • 9780819431547 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#curatoriVolume
  • Bernard Courtois; Selden B. Crary; Wolfgang Ehrfeld; Hiroyuki Fujita; Jean Michel Karam; Karen W. Markus (literal)
Abstract
  • The change in the SAW phase velocity due to the presence of a TiO2 thin film on the propagation surface of a piezoelectric substrate has been used for the determination of the elastic constants of the layer. The relative change Delta v/v in the SAW phase velocity v(0) is expressed, using the perturbation theory, in function of the material density and of the elastic constants of the film. A comparison between the values of Delta v/v obtained with exact calculations, the approximate theory and the experimental values allowed us to evaluate the physical constants of TiO2 films to be used as sensitive membranes in relative humidity sensors applications. (literal)
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