Piezoelectric AlN films for SAW devices applications (Contributo in atti di convegno)

Type
Label
  • Piezoelectric AlN films for SAW devices applications (Contributo in atti di convegno) (literal)
Anno
  • 1993-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1109/ULTSYM.1993.339578 (literal)
Alternative label
  • C. CALIENDO, G. SAGGIO, P. VERARDI, E. VERONA (1993)
    Piezoelectric AlN films for SAW devices applications
    in IEEE International Ultrasonics Symposium, Baltimore, Oct. 31- Nov. 3, 1993
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • C. CALIENDO, G. SAGGIO, P. VERARDI, E. VERONA (literal)
Pagina inizio
  • 249 (literal)
Pagina fine
  • 252 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=339578 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 1 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
  • Scopu (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Istituto di Acustica \"O. M. Corbino\", CNR, Via Cassia 1216, Roma, Italy (literal)
Titolo
  • Piezoelectric AlN films for SAW devices applications (literal)
Abstract
  • Polycrystalline AlN films with the c-axis oriented normal to the substrate surface, were deposited by RF reactive diode magnetron sputtering on fused quartz, silicon and sapphire. The films were characterized as to their morphology, optic and acoustic characteristics. The phase velocity dispersion curves vs normalized film thickness were evaluated theoretically together with the electromechanical coupling coefficient for the four different interdigital transducers geometries. The theoretical results were compared experimental values. Results showd AlN for applications to SAW devices. (literal)
Prodotto di
Autore CNR
Insieme di parole chiave

Incoming links:


Autore CNR di
Prodotto
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
Insieme di parole chiave di
data.CNR.it