http://www.cnr.it/ontology/cnr/individuo/prodotto/ID214204
Piezoelectric AlN films for SAW devices applications (Contributo in atti di convegno)
- Type
- Label
- Piezoelectric AlN films for SAW devices applications (Contributo in atti di convegno) (literal)
- Anno
- 1993-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1109/ULTSYM.1993.339578 (literal)
- Alternative label
C. CALIENDO, G. SAGGIO, P. VERARDI, E. VERONA (1993)
Piezoelectric AlN films for SAW devices applications
in IEEE International Ultrasonics Symposium, Baltimore, Oct. 31- Nov. 3, 1993
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- C. CALIENDO, G. SAGGIO, P. VERARDI, E. VERONA (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
- http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=339578 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Note
- ISI Web of Science (WOS) (literal)
- Scopu (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- Istituto di Acustica \"O. M. Corbino\", CNR, Via Cassia 1216, Roma, Italy (literal)
- Titolo
- Piezoelectric AlN films for SAW devices applications (literal)
- Abstract
- Polycrystalline AlN films with the c-axis oriented
normal to the substrate surface, were deposited by RF
reactive diode magnetron sputtering on fused quartz,
silicon and sapphire. The films were characterized as
to their morphology, optic and acoustic characteristics.
The phase velocity dispersion curves vs normalized
film thickness were evaluated theoretically together
with the electromechanical coupling coefficient for the
four different interdigital transducers geometries. The
theoretical results were compared
experimental values. Results showd AlN
for applications to SAW devices. (literal)
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