On-chip fabrication of ultrasensitive NO2 sensors based on silicon nanowires (Articolo in rivista)

Type
Label
  • On-chip fabrication of ultrasensitive NO2 sensors based on silicon nanowires (Articolo in rivista) (literal)
Anno
  • 2012-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1063/1.4748099 (literal)
Alternative label
  • M. Cuscunà, A. Convertino, E. Zampetti, A. Macagnano, A. Pecora, G. Fortunato, L. Felisari, G. Nicotra, C. Spinella, F. Martelli (2012)
    On-chip fabrication of ultrasensitive NO2 sensors based on silicon nanowires
    in Applied physics letters
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • M. Cuscunà, A. Convertino, E. Zampetti, A. Macagnano, A. Pecora, G. Fortunato, L. Felisari, G. Nicotra, C. Spinella, F. Martelli (literal)
Pagina inizio
  • 103101 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 101 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 5 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 10 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • [1] CNR, Ist Microelettr & Microsist, I-00133 Rome, Italy [2] TASC IOM CNR, I-34149 Trieste, Italy [3] CNR, Ist Microelettr & Microsist, I-95121 Catania, Italy (literal)
Titolo
  • On-chip fabrication of ultrasensitive NO2 sensors based on silicon nanowires (literal)
Abstract
  • We report a very simple, robust, and reliable on-chip fabrication method of a chemoresistive sensor based on silicon nanowires (NWs). Our method permits the use of nanowires without the need of their removal and transfer to a support different from the growth substrate. Our method, completely based on the silicon technology platform, exploits nanowires directly grown onto a selected area, over and between pre-patterned, interdigitated electrodes defined on oxidized silicon. The fabricated sensor is capable to detect NO2 down to a few ppb levels operating at room temperature. The sensor characteristics benefit of the presence of self-welded nanowires. (literal)
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