http://www.cnr.it/ontology/cnr/individuo/prodotto/ID212917
On-chip fabrication of ultrasensitive NO2 sensors based on silicon nanowires (Articolo in rivista)
- Type
- Label
- On-chip fabrication of ultrasensitive NO2 sensors based on silicon nanowires (Articolo in rivista) (literal)
- Anno
- 2012-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1063/1.4748099 (literal)
- Alternative label
M. Cuscunà, A. Convertino, E. Zampetti, A. Macagnano, A. Pecora, G. Fortunato, L. Felisari, G. Nicotra, C. Spinella, F. Martelli (2012)
On-chip fabrication of ultrasensitive NO2 sensors based on silicon nanowires
in Applied physics letters
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- M. Cuscunà, A. Convertino, E. Zampetti, A. Macagnano, A. Pecora, G. Fortunato, L. Felisari, G. Nicotra, C. Spinella, F. Martelli (literal)
- Pagina inizio
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
- Note
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- [1] CNR, Ist Microelettr & Microsist, I-00133 Rome, Italy
[2] TASC IOM CNR, I-34149 Trieste, Italy
[3] CNR, Ist Microelettr & Microsist, I-95121 Catania, Italy (literal)
- Titolo
- On-chip fabrication of ultrasensitive NO2 sensors based on silicon nanowires (literal)
- Abstract
- We report a very simple, robust, and reliable on-chip fabrication method of a chemoresistive sensor based on silicon nanowires (NWs). Our method permits the use of nanowires without the need of their removal and transfer to a support different from the growth substrate. Our method, completely based on the silicon technology platform, exploits nanowires directly grown onto a selected area, over and between pre-patterned, interdigitated electrodes defined on oxidized silicon. The fabricated sensor is capable to detect NO2 down to a few ppb levels operating at room temperature. The sensor characteristics benefit of the presence of self-welded nanowires. (literal)
- Autore CNR
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