Metal-organic chemical vapour deposition of Nd(2/3) Cu(3)Ti(4)O(12) films (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Metal-organic chemical vapour deposition of Nd(2/3) Cu(3)Ti(4)O(12) films (Articolo in rivista) (literal)

Anno

• 2010-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1088/1757-899X/8/1/012019 (literal)

Alternative label

• Maria Rita Catalano, Raffaella Lo Nigro, Roberta G. Toro, Claudia Giddio, Graziella Malandrino, Vito Raineri,Ignazio L. Fragalà (2010)
  Metal-organic chemical vapour deposition of Nd(2/3) Cu(3)Ti(4)O(12) films
  in IOP conference series. Materials science and engineering (Print)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Maria Rita Catalano, Raffaella Lo Nigro, Roberta G. Toro, Claudia Giddio, Graziella Malandrino, Vito Raineri,Ignazio L. Fragalà (literal)

Pagina inizio

• 012019-1 (literal)

Pagina fine

• 012019-5 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 8 (literal)

Rivista

• IOP conference series. Materials science and engineering (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 5 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• Dipartimento di Scienze Chimiche, Università di Catania, and INSTM, UdR Catania, Viale A. Doria 6, 95125 Catania, Italy IMM, sezione di Catania, CNR, Stradale Primo Sole n 50, 95121 Catania, Italy. (literal)

Titolo

• Metal-organic chemical vapour deposition of Nd(2/3) Cu(3)Ti(4)O(12) films (literal)

Abstract

• The discovery of the so called \"giant dielectric permittivity phenomenon\" in CaCu(3)Ti(4)O(12) (CCTO) perovskyte-related material reaching dielectric constant values up to 10(5) at room temperature, has generated a large interest for this material and related compounds. In this context, the study of the related oxide materials can be of great interest. In this work, we report on the results of a recent study of the deposition of Nd(2/3)Cu(3)Ti(4)O(12) (NCTO) thin films on Pt/TiO(2)/SiO(2)/Si(100) stacks by Metal-Organic Chemical Vapor Deposition (MOCVD). Nd(2/3)Cu(3)Ti(4)O(12) thin films have been deposited using a novel molten multi-metal source, ;onsisting of the Ti(tmhd)(2)(O-iPr)(2), Nd(hfa)(3)center dot diglyme, and Cu(tmhd)(2) (H-tmhd=2,2,6,6-tetramethyl-3,5-heptandione; O-iPr= iso-propoxide; H-hfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedione; diglyme= CH(3)O(CH(2)CH(2)O)(2)CH(3)) precursor mixture. The structural and morphological characterization of films has been carried out using X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM). Chemical compositional studies have been performed by energy dispersive X-ray (EDX) analysis and X-ray photoelectron spectroscopy (XPS). Structural and morphological characterizations point to formation of thin films having the correct stoichiometry and a sharp film/substrate interface structure (literal)

Prodotto di

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Materiali multifunzionali, e innovativi per componenti integrati (MD.P05.003.002) (Modulo)

Autore CNR

• ROBERTA GRAZIA TORO (Unità di personale interno)
• RAFFAELLA LO NIGRO (Unità di personale interno)

Insieme di parole chiave

• Keywords of "Metal-organic chemical vapour deposition of Nd(2/3) Cu(3)Ti(4)O(12) films" (Insieme di parole chiave)

Incoming links:

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Materiali multifunzionali, e innovativi per componenti integrati (MD.P05.003.002) (Modulo)

Autore CNR di

• RAFFAELLA LO NIGRO (Unità di personale interno)
• ROBERTA GRAZIA TORO (Unità di personale interno)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• IOP conference series. Materials science and engineering (Rivista)

Insieme di parole chiave di

• Keywords of "Metal-organic chemical vapour deposition of Nd(2/3) Cu(3)Ti(4)O(12) films" (Insieme di parole chiave)