SnO2 : Sb - A new material for high-temperature MEMS heater applications: Performance and limitations (Articolo in rivista)

Type
Label
  • SnO2 : Sb - A new material for high-temperature MEMS heater applications: Performance and limitations (Articolo in rivista) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Alternative label
  • Spannhake, J; Helwig, A; Muller, G; Faglia, G; Sberveglieri, G; Doll, T; Wassner, T; Eickhoff, A (2007)
    SnO2 : Sb - A new material for high-temperature MEMS heater applications: Performance and limitations
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Spannhake, J; Helwig, A; Muller, G; Faglia, G; Sberveglieri, G; Doll, T; Wassner, T; Eickhoff, A (literal)
Pagina inizio
  • 421 (literal)
Pagina fine
  • 428 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 124 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • EADS Corp, Res Ctr, LGME, Corp Res Ctr Germany, D-81663 Munich, Germany; CNR, INFM, I-25133 Brescia, Italy; Univ Brescia, I-25133 Brescia, Italy; Univ Mainz, D-55128 Mainz, Germany; Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany (literal)
Titolo
  • SnO2 : Sb - A new material for high-temperature MEMS heater applications: Performance and limitations (literal)
Abstract
  • MEMS micro heater devices capable of long-term operation at temperatures up to 1000 degrees C are presented. The enhanced long-term stability has been achieved by employing antimony-doped tin oxide (SnO2:Sb) as a substitute for the conventionally used noble metal heater resistors. A detailed investigation of its high-temperature stability reveals that degradation is caused by out-diffusion of Sb impurities from the SnO2 film. (c) 2007 Elsevier B.V. All rights reserved. (literal)
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