Fabrication and characterization of a directional anemometer based on a single chip MEMS flow sensor (Articolo in rivista)

Type
Label
  • Fabrication and characterization of a directional anemometer based on a single chip MEMS flow sensor (Articolo in rivista) (literal)
Anno
  • 2011-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.mee.2010.11.009 (literal)
Alternative label
  • M. Piotto; G. Pennelli; P. Bruschi (2011)
    Fabrication and characterization of a directional anemometer based on a single chip MEMS flow sensor
    in Microelectronic engineering; North Holland Pub. Co., Amsterdam (Paesi Bassi)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • M. Piotto; G. Pennelli; P. Bruschi (literal)
Pagina inizio
  • 2214 (literal)
Pagina fine
  • 2217 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 88 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#note
  • (ISSN 0167-9317) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 4 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 8 (literal)
Note
  • Scopu (literal)
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • IEIIT - Pisa, CNR, Pisa 56122, Italy Dipartimento Ingegneria dell'Informazione, Universit√† di Pisa, Pisa 56122, Italy Dipartimento Ingegneria dell'Informazione, Universit√† di Pisa, Pisa 56122, Italy (literal)
Titolo
  • Fabrication and characterization of a directional anemometer based on a single chip MEMS flow sensor (literal)
Abstract
  • A compact anemometer based on integrated flow sensors is presented. The device exploits a recently proposed approach, by which the pressure induced on the lateral surface of a cylinder exposed to the wind is converted into two air flow rates exhibiting sinusoidal dependence on the wind direction. A significant size reduction and assemblage simplification were achieved by sensing the two flows by means of a double channel flow meter, integrated on a single silicon chip. The results of measurements, performed over a wind velocity range 0.4-7.9 m/s, demonstrated the effectiveness of the proposed anemometer. (literal)
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