Pulsed laser ablation of complex oxides: The role of congruent ablation and preferential scattering for the film stoichiometry (Articolo in rivista)

Type
Label
  • Pulsed laser ablation of complex oxides: The role of congruent ablation and preferential scattering for the film stoichiometry (Articolo in rivista) (literal)
Anno
  • 2012-01-01T00:00:00+01:00 (literal)
Alternative label
  • S. Wicklein1, A. Sambri2, S. Amoruso2, X. Wang2, R. Bruzzese2, A. Koehl1, and R. Dittmann1 (2012)
    Pulsed laser ablation of complex oxides: The role of congruent ablation and preferential scattering for the film stoichiometry
    in Applied physics letters
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • S. Wicklein1, A. Sambri2, S. Amoruso2, X. Wang2, R. Bruzzese2, A. Koehl1, and R. Dittmann1 (literal)
Pagina inizio
  • 131601 (literal)
Pagina fine
  • 131601-5 (literal)
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  • http://dx.doi.org/10.1063/1.4754112 (literal)
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  • 101 (literal)
Rivista
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  • 5 (literal)
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  • 13 (literal)
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  • 1Peter Grünberg Institut and JARA-FIT, Forschungszentrum Juelich GmbH, 52425 Juelich, Germany 2CNR-SPIN and Dipartimento di Scienze Fisiche, Complesso Universitario di Monte Sant'Angelo, Via Cintia, I-80125 Napoli, Italy (literal)
Titolo
  • Pulsed laser ablation of complex oxides: The role of congruent ablation and preferential scattering for the film stoichiometry (literal)
Abstract
  • By combining structural and chemical thin film analysis with detailed plume diagnostics and modeling of the laser plume dynamics, we are able to elucidate the different physical mechanisms determining the stoichiometry of the complex oxides model material SrTiO3 during pulsed laser deposition. Deviations between thin film and target stoichiometry are basically a result of two effects, namely, incongruent ablation and preferential scattering of lighter ablated species during their motion towards the substrate in the O2 background gas. On the one hand, a progressive preferential ablation of the Ti species with increasing laser fluence leads to a regime of Ti-rich thin film growth at larger fluences. On the other hand, in the low laser fluence regime, a more effective scattering of the lighter Ti plume species results in Sr rich films. (literal)
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