http://www.cnr.it/ontology/cnr/individuo/prodotto/ID203063
Electrodissolution of p-Si in Acidic Fluoride Media. Modeling of the Steady State (Articolo in rivista)
- Type
- Label
- Electrodissolution of p-Si in Acidic Fluoride Media. Modeling of the Steady State (Articolo in rivista) (literal)
- Anno
- 2000-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1149/1.1393895 (literal)
- Alternative label
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Cattarin S.; Frateur I.; Musiani M.; Tribollet B. (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
- http://jes.ecsdl.org/content/147/9/3277 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
- Note
- Scopu (literal)
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- 1-3 : IPELP CNR, Corso Stati Uniti, 4 35127 Padova, Italy
4 : UPR 15 CNRS, 75252 Paris Cedex 05, France (literal)
- Titolo
- Electrodissolution of p-Si in Acidic Fluoride Media. Modeling of the Steady State (literal)
- Abstract
- With the aim of explaining the dependence of the steady-state electrodissolution current density (I) of Si in acidic fluoride media on total fluoride concentration (CF), pH, and mass transfer rate, a kinetic model is proposed. The Si electrode is assumed to be covered by a thin SiO2 layer, formed by an electrochemical reaction at the Si/oxide interface, which undergoes dissolution by three parallel chemical reactions. These reactions convert SiO2 to SiF62-, under the action of HF and HF2-, and occur under mixed control; their kinetics is assumed to be of the second order. Fast equilibria between fluoride species and H+ are assumed. The model is compared with experimental results obtained by ourselves and with those in the literature. The CF, pH, and ? dependencies of the current density measured at a fixed potential in the electropolishing domain are well reproduced with an appropriate choice of the rate constants of the dissolution reactions, the only adjustable parameters. It is shown that I depends on the angular speed of the electrode (?) in such a way that I-1 vs. ?-1/2 plots are almost linear, resembling traditional Koutecky-Levich behavior. (literal)
- Prodotto di
- Autore CNR
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