Optofluidic microsystems with integrated vertical one-dimensional photonic crystals for chemical analysis (Articolo in rivista)

Type
Label
  • Optofluidic microsystems with integrated vertical one-dimensional photonic crystals for chemical analysis (Articolo in rivista) (literal)
Anno
  • 2012-01-01T00:00:00+01:00 (literal)
Alternative label
  • S. Surdo, S. Merlo, F. Carpignano, L. M. Strambini, C. Trono, A. Giannetti, F. Baldini, G. Barillaro (2012)
    Optofluidic microsystems with integrated vertical one-dimensional photonic crystals for chemical analysis
    in Lab on a chip (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • S. Surdo, S. Merlo, F. Carpignano, L. M. Strambini, C. Trono, A. Giannetti, F. Baldini, G. Barillaro (literal)
Pagina inizio
  • 4403 (literal)
Pagina fine
  • 4415 (literal)
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  • 12 (literal)
Rivista
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  • 13 (literal)
Note
  • ISI Web of Science (WOS) (literal)
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  • Dipartimento di Ingegneria dell'Informazione: Elettronica, Informatica, Telecomunicazioni, Università di Pisa Dipartimento di Ingegneria Industriale e dell'Informazione, Università di Pavia Istituto di Fisica Applicata - IFAC-CNR (literal)
Titolo
  • Optofluidic microsystems with integrated vertical one-dimensional photonic crystals for chemical analysis (literal)
Abstract
  • In this work, we report all-silicon, integrated optofluidic microsystems (OFMs) fabricated by electrochemical micromachining (ECM) technology, in which high aspect-ratio (HAR) photonic crystal (PhC) devices (i.e. micromirrors, optical cavities) are integrated by one-etching-step, together with microfluidic reservoirs/channels, for the infiltration of liquids in the PhC air gaps, and with fiber grooves for alignment/positioning of readout optical fibers in front of the PhC, on the same silicon die. This has not previously been reported in the literature, and opens up new ground in, though not limited to, the optofluidics field, due to the low-cost and high-flexibility of the ECM technology that allows optofluidic microsystem fabrication to be performed in any lab. Optofluidic characterization of PhC-OFMs by both capillary-action and pressure-driven operations is carried out through the measurement of the reflectivity spectra of HAR-PhCs upon injection of liquids featuring different refractive index values in the HAR-PhC air gaps, by using readout optical fibers positioned in the onchip fiber grooves. High sensitivity and good limit of detection of PhC-OFMs re obtained for both capillary-action and pressure-driven operations. A best sensitivity value of 670 nm/RIU and a worstcase limit of detection of the order of 1023 RIU are measured, the former being comparable to stateof- the-art integrated refractive index sensors and the latter being limited by constraints of the experimental setup. The proof of concept about the biosensing potential of PhC-OFMs is given by successfully carrying out a sandwich assay based on antigen-antibody interactions for the detection of the C-reactive protein (CRP) at a concentration value of 10 mg L21, which represents the boundary level between physiological and pathological conditions. (literal)
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