http://www.cnr.it/ontology/cnr/individuo/prodotto/ID195109
Determination of hydrogen concentration in a-Si and a-Ge layers by elastic recoil detection analysis (Articolo in rivista)
- Type
- Label
- Determination of hydrogen concentration in a-Si and a-Ge layers by elastic recoil detection analysis (Articolo in rivista) (literal)
- Anno
- 2012-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1016/j.vacuum.2011.07.050 (literal)
- Alternative label
Khánh, N. Q.; Serényi, Miklos; Csik, A.; Frigeri, Cesare (2012)
Determination of hydrogen concentration in a-Si and a-Ge layers by elastic recoil detection analysis
in Vacuum; Elsevier Ltd, Oxford (Regno Unito)
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Khánh, N. Q.; Serényi, Miklos; Csik, A.; Frigeri, Cesare (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
- http://www.sciencedirect.com/science/article/pii/S0042207X11002971 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
- Note
- ISI Web of Science (WOS) (literal)
- Scopu (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- a Research Institute for Technical Physics and Materials Science, Hungarian Academy of Sciences (MTA-MFA), H-1121 Budapest, Konkoly-Thege ut 29-33, Hungary
b Institute of Nuclear Research of the Hungarian Academy of Sciences (ATOMKI), H-4001 Debrecen, P.O. Box 51, Hungary
c CNR-IMEM Institute, Parco Area delle Scienze, 37/A, 43010 Parma, Italy (literal)
- Titolo
- Determination of hydrogen concentration in a-Si and a-Ge layers by elastic recoil detection analysis (literal)
- Abstract
- In this work we have studied the individual a-Si and a-Ge hydrogenated layers prepared by RF sputtering on Si (100) substrates using Ar and H 2 gas mixture. The absolute value of atomic content of the H was determined by Elastic Recoil Detection Analysis (ERDA) with 1.6 MeV 4He + beam. The dynamics of the out diffusion was investigated by annealing in high purity (99.999%) argon atmosphere at 350 °C for several hours. It was clearly shown that hydrogen can diffuse out faster from Ge film than from the Si one during annealing of the samples. © 2011 Elsevier Ltd. All rights reserved. (literal)
- Editore
- Prodotto di
- Autore CNR
- Insieme di parole chiave
Incoming links:
- Prodotto
- Autore CNR di
- Editore di
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
- Insieme di parole chiave di