http://www.cnr.it/ontology/cnr/individuo/prodotto/ID192650
Integration of ZnO nano-tetrapods onto a micro hot plate structure for H2S sensing (Abstract/Poster in convegno)
- Type
- Label
- Integration of ZnO nano-tetrapods onto a micro hot plate structure for H2S sensing (Abstract/Poster in convegno) (literal)
- Anno
- 2012-01-01T00:00:00+01:00 (literal)
- Alternative label
Cocuzza Matteo, Marasso Simone, Perrone Denis, Mombello Domenico, Tommasi Alessio, Zappettini Andrea, Mosca Roberto, Calestani Davide, Ricci Alessandro (2012)
Integration of ZnO nano-tetrapods onto a micro hot plate structure for H2S sensing
in 38th International Micro & Nano Engineering Conference (MNE 2012), Toulouse, France, 16-20/09/2012
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Cocuzza Matteo, Marasso Simone, Perrone Denis, Mombello Domenico, Tommasi Alessio, Zappettini Andrea, Mosca Roberto, Calestani Davide, Ricci Alessandro (literal)
- Note
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- IMEM-CNR, Parma, 43100, Italy
Trustech s.r.l., Chivasso, 10034, Italy
IIT, Torino, 10129, Italy
Politecnico di Torino, Torino, 10129, Italy (literal)
- Titolo
- Integration of ZnO nano-tetrapods onto a micro hot plate structure for H2S sensing (literal)
- Abstract
- ZnO nanostructures are widely employed in micro and nano devices, such as light emitting or laser diodes, field effect transistors, piezoelectric devices and many others. A nanostructures top down integration approach enables VLSI production scaling up since, in principle, more compatible with standard IC fabrication. In this view, a novel H2S MEMS based sensor that integrates a nanostructured ZnO film has a great potential in this field [1,2]. The integration of nanotetrapods on a thin membrane allows for increasing the sensing performance, and obtaining a detection of H2S gas at the ppb order with a much faster response than that of standard sensors [3,4]. In this work a micro hot plate on a suspended Si3N4 membrane embedding a nanostuctured film of TPs (Tetrapods) was developed. (literal)
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