Integration of ZnO nano-tetrapods onto a micro hot plate structure for H2S sensing (Abstract/Poster in convegno)

Type
Label
  • Integration of ZnO nano-tetrapods onto a micro hot plate structure for H2S sensing (Abstract/Poster in convegno) (literal)
Anno
  • 2012-01-01T00:00:00+01:00 (literal)
Alternative label
  • Cocuzza Matteo, Marasso Simone, Perrone Denis, Mombello Domenico, Tommasi Alessio, Zappettini Andrea, Mosca Roberto, Calestani Davide, Ricci Alessandro (2012)
    Integration of ZnO nano-tetrapods onto a micro hot plate structure for H2S sensing
    in 38th International Micro & Nano Engineering Conference (MNE 2012), Toulouse, France, 16-20/09/2012
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Cocuzza Matteo, Marasso Simone, Perrone Denis, Mombello Domenico, Tommasi Alessio, Zappettini Andrea, Mosca Roberto, Calestani Davide, Ricci Alessandro (literal)
Note
  • Poster (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • IMEM-CNR, Parma, 43100, Italy Trustech s.r.l., Chivasso, 10034, Italy IIT, Torino, 10129, Italy Politecnico di Torino, Torino, 10129, Italy (literal)
Titolo
  • Integration of ZnO nano-tetrapods onto a micro hot plate structure for H2S sensing (literal)
Abstract
  • ZnO nanostructures are widely employed in micro and nano devices, such as light emitting or laser diodes, field effect transistors, piezoelectric devices and many others. A nanostructures top down integration approach enables VLSI production scaling up since, in principle, more compatible with standard IC fabrication. In this view, a novel H2S MEMS based sensor that integrates a nanostructured ZnO film has a great potential in this field [1,2]. The integration of nanotetrapods on a thin membrane allows for increasing the sensing performance, and obtaining a detection of H2S gas at the ppb order with a much faster response than that of standard sensors [3,4]. In this work a micro hot plate on a suspended Si3N4 membrane embedding a nanostuctured film of TPs (Tetrapods) was developed. (literal)
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