ELECTRO-ACTIVE MICROELECTROMECHANICAL DEVICE AND CORRESPONDING DETECTION PROCESS (Brevetto)

Type
Label
  • ELECTRO-ACTIVE MICROELECTROMECHANICAL DEVICE AND CORRESPONDING DETECTION PROCESS (Brevetto) (literal)
Anno
  • 2011-01-01T00:00:00+01:00 (literal)
Alternative label
  • Qualtieri A., Rizzi F., De Vittorio M., Passaseo A., Todaro M., Epifani G (2011)
    ELECTRO-ACTIVE MICROELECTROMECHANICAL DEVICE AND CORRESPONDING DETECTION PROCESS
    (literal)
Titolo
  • ELECTRO-ACTIVE MICROELECTROMECHANICAL DEVICE AND CORRESPONDING DETECTION PROCESS (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Qualtieri A., Rizzi F., De Vittorio M., Passaseo A., Todaro M., Epifani G (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#proprieta
  • IIT (literal)
Http://www.cnr.it/ontology/cnr/brevetti.owl#tipoDiBrevetto
  • Internazionale (literal)
Numero brevetto
  • WO/2012/035491 (literal)
Anno di deposito
  • 2011 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • IIT, CNR-NANO (literal)
Titolo
  • ELECTRO-ACTIVE MICROELECTROMECHANICAL DEVICE AND CORRESPONDING DETECTION PROCESS (literal)
Abstract
  • Electroactive microelectromechanical device of the Artificial Hair Cell type, comprising a moving cilium structure including a substrate (11, 12; 42) and a cantilever (18; 48), partly or entirely in.piezoelectric material, subject to bending or deformation following the action of a force and/or an applied voltage (Vapp1), said cantilever (18; 48) comprising a multilayer (13, 14a, 14b, 16) inducing a stress-driven geometry in which a portion (19) of said cantilever (18; 48) lies outside of a plane defined by the substrate (11, 12; 42). According to the invention said cantilever (18; 48) is associated to a piezoresistive element, in particular of piezoresistive material (15) configured to measure the bending or deformation of said cantilever (18; 48). (literal)
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Autore CNR

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